Publications

Title Author Year Publication type
Low-Loss Wafer-Bonded Silicon Photonic MEMS Switches Amirmahdi Honardoost; Johannes Henriksson; Kyungmok Kwon; Jianheng Luo; Ming C. Wu 2022 Conference Paper (Proceedings)
High Velocity Diamond Disk Resonator William Dong; Hung-Yu Chen; Kevin H. Zheng; Xintian Liu; Clark T.-C. Nguyen 2026 Conference Paper (Proceedings)
Trial-and-Error Learning for MEMS Structural Design Enabled by Deep Reinforcement Learning Fanping Sui; Wei Yue; Ziqi Zhang; Ruiqi Guo; Liwei Lin 2023 Conference Paper (Proceedings)
A Fully Wireless, Miniaturized Multicolor Fluorescence Image Sensor Implant for Real-Time Monitoring in Cancer Therapy Rozhan Rabbani; Micah Roschelle; Surin Gweon; Rohan Kumar; Alec Vercruysse; Nam Woo Cho; Matthew H. Spitzer; Ali M. Niknejad; Vladimir Stojanović; Mekhail Anwar 2024 Conference Paper (Proceedings)
199-MHz Polysilicon Micromechanical Disk Array-Composite Oscillator Qianyi Xie; Sherwin A. Afshar; Alper Ozgurluk; Clark T.-C. Nguyen 2020 Conference Paper (Proceedings)
20.3 An RFID-inspired One-step Packaged Multi-mode Bio-analyzer with Vacuum Microfluidics for Point-of-Care Diagnostics Yan-Ting Hsiao; Ya-Chen (Justine) Tsai; Wei Foo; Hung-Yu Hou; Yun-Chun Su; Yueting Lily Li; Jun-Chau Chien 2025 Conference Paper (Proceedings)
Zero-Change Foundry Compatible Silicon Photonics MEMS Optical Switch Arkadev Roy; Daniel Klawson; Jianheng Luo; Erik Anderson; Yiyang Zhi; Sirui Tang; Ming C. Wu 2025 Conference Paper (Proceedings)
Data-Driven Freeform MEMS Energy Harvester Design Enabled by Machine Learning Kunying Li; Ruiqi Guo; Fanping Sui; Liwei Lin 2022 Conference Paper (Proceedings)
Designing Weakly Coupled MEMS Resonators with Machine Learning-Based Method Fanping Sui; Wei Yue; Ruiqi Guo; Kamyar Behrouzi; Liwei Lin 2021 Conference Paper (Proceedings)
Drone-Mounted Low-Frequency pMUTs for > 6-Meter Rangefinder in Air Hanxiao Liu; Yande Peng; Wei Yue; Seiji Umezawa; Shinsuke Ikeuchi; Yasuhiro Aida; Chunming Chen; Peggy Tsao; Ying Dong; Xiaohao Wang; Liwei Lin 2023 Conference Paper (Proceedings)
Temperature-Insensitive Resonant Strain Sensor Xintian Liu; Qianyi Xie; Alper Ozgurluk; Clark T.-C. Nguyen 2022 Conference Paper (Proceedings)
Biological Bone Age Assessment via PMUTs Nikita Lukhanin; Fan Xia; Sean Isomatsu; Megan Teng; Bo Jiang; Jean-Daniel Zanone; Liwei Lin 2025 Conference Paper (Proceedings)
A High Seebeck Coeffiecient Thermoelectric Generator Based on a Self-Healing Ionogel Yu Long; Peisheng He; Yande Peng; Liwei Lin 2022 Conference Paper (Proceedings)
Large-scale Silicon Photonics Focal Plane Switch Array for Optical Beam Steering Xiaosheng Zhang; Kyungmok Kwon; Johannes Henriksson; Jianheng Luo; Ming C. Wu 2021 Conference Paper (Proceedings)
Customizing MEMS Designs via Conditional Generative Adversarial Networks Fanping Sui; Ruiqi Guo; Wei Yue; Kamyar Behrouzi; Liwei Lin 2021 Conference Paper (Proceedings)
Auto-Posting and Haptic Stimulations via a 35mm Square pMUT Array Wei Yue; Yande Peng; Hanxiao Liu; Fan Xia; Fanping Sui; Seiji Umezawa; Shinsuke Ikeuchi; Yasuhiro Aida; Liwei Lin 2023 Conference Paper (Proceedings)
Performance Enhancement and Restoration of Micromechanical Resonators Via UV-Ozone Treatment Qianyi Xie; Sherwin A. Afshar; Alper Ozgurluk; Clark T.-C. Nguyen 2021 Conference Paper (Proceedings)
A 0.7pArms Electrochemical Readout IC for Continuous Monitoring of Antibody Biologics in Upstream Biomanufacturing Hung-Yu Hou; Ya-Chen (Justine) Tsai; Wei Foo; Yan-Ting Hsiao; Jun-Chau Chien 2025 Conference Paper (Proceedings)
Transient Closed-Loop Heating for Localized MEMS Bonding Daniel Teal; Kristofer S.J. Pister 2022 Conference Paper (Proceedings)
Frequency Compensated Crystal-Free 802.15.4 Wireless Radio Alex Moreno; Kristofer S.J. Pister 2022 Conference Paper (Proceedings)
Interceptor Swarms for Naval Defense: A Simulation-Based Evaluation of Hierarchical Swarm-vs.-Swarm Strategies Titan Yuan; Daniel Lovell; Kristofer S.J. Pister 2026 Conference Paper (Proceedings)
Enhanced Real-Time Gas Detection Accuracy by a Scalable Machine Learning Scheme Yuan Gao; Wei Yue; Qiuyang Xiao; Peisheng He; Liwei Lin 2025 Conference Paper (Proceedings)
Subcutaneous and Continuous Blood Pressure Monitoring by PMUTS in an Ambulatory Sheep Yande Peng; Sedat Pala; Zhichun Shao; Hong Ding; Jin Xie; Liwei Lin 2022 Conference Paper (Proceedings)
Fabrication Tolerant Inverse Design Grating Couplers for Scalable Trapped Ion Quantum Computing Daniel Klawson; Mizuki Shirao; Sara Mouradian; Ming C. Wu 2022 Conference Paper (Proceedings)
Fully Balanced Differential Micromechanical Resonator Reference Oscillator Kevin H. Zheng; Xintian Liu; Alper Ozgurluk; Clark T.-C. Nguyen 2025 Conference Paper (Proceedings)
A Non-Wolatile Surface Tension-Driven Electricochemical Liquid Metal Actuator Xiaohang Chen; Zihan Wang; Wei Yue; Peisheng He; Liwei Lin 2024 Conference Paper (Proceedings)
Improved Ring-Down Time and Axial Resolutions of PMUTs via Phase-Shift Excitation Scheme Sedat Pala; Zhichun Shao; Yande Peng; Liwei Lin 2021 Conference Paper (Proceedings)
3D Imaging via Four PMUT Receivers by Compressed Sensing Nikita Lukhanin; Divij Muthu; Chaoying Gu; Megan Teng; Kamyar Behrouzi; Chun-Ming Chen; Laura Waller; Liwei Lin 2026 Conference Paper (Proceedings)
Scalable Ultra Low-Power Chemical Sensing with Metal-Organic Frameworks David Gardner; Xiang Gao; Hossain M. Fahad; An-Ting Yang; Sam He; Ali Javey; Carlo Carraro; Roya Maboudian 2019 Conference Paper (Proceedings)
2-DOF Actuated Micromirror Designed for Large DC Deflection Mathew Last; Kristofer S.J. Pister 1999 Conference Paper (Proceedings)
Moisture-Induced Energy Harvesters by Water Harvesting for Continuous Arid Environment Operations Jong Ha Park; Peisheng He; Sujoy K. Ghosh; Fan Xia; Nikita Lukhanin; Jundong Zhai; Ryan D. Rundle; Liwei Lin 2025 Conference Paper (Proceedings)
Lego-Like Reconfigurable Soft Haptic Array via Self-Healing Sensor/Actuator Modules Peisheng He; Wenying Qiu; Yande Peng; Jong Ha Park; Qilong Cheng; David Bogy; Liwei Lin 2024 Conference Paper (Proceedings)
Ultrasound-Induced Haptic Sensations via PMUTs Sedat Pala; Zhichun Shao; Yande Peng; Liwei Lin 2021 Conference Paper (Proceedings)
Piezoelectric and Piezoelectret Sensors, Actuators and Microsystems Liwei Lin 2025 Conference Paper (Proceedings)
Ultra-Sensitive Nanosensor for Rapid Detection of PFAS in Simulated Drinking Water Nikita Lukhanin; Keming Bai; Mia Wang; Declan M. Fitzgerald; Grigory Tikhomirov; Liwei Lin 2026 Conference Paper (Proceedings)
Micromachined Resonant Electrometer Patrick Riehl; Richard S. Muller; Roger T. Howe 1999 Master's Thesis
Jewel Bearings for Micro Disk Drives Kelly Yang; Albert P. Pisano 1996 Master's Thesis
A High-Voltage Charge Pump in Bulk CMOS Eugene Lau Cheung; Bernhard Boser; Albert P. Pisano 1996 Master's Thesis
Lateral Etching of Silicon: The Hole-in-the-Wall Fabrication Processes Jeremy Frank; Albert P. Pisano; Liwei Lin; Lydia L. Sohn 2004 Master's Thesis
Transparent Micro-electrocorticography (μECoG) Arrays for Optogenetic Mapping of Surface Potentials Brian Pepin; Michel M. Maharbiz 2013 Master's Thesis
Micromechanical Electrostatic Voltmeter Charles Heng-Yuan Hsu; Richard S. Muller; Roger T. Howe 1991 Master's Thesis
Integrated Mesoscopic Fluidic Interconnects for Micro-Machined Fluidic Devices Jennifer Ann Scalf; Albert P. Pisano; Dorian Liepmann 1999 Master's Thesis
Monolithic Piezoelectrically-Actuated MEMS-Tunable VCSEL Kan Bun Cheng; Albert P. Pisano; Ming C. Wu 2006 Master's Thesis
Integrated Optical MEMS for Scalable Trapped Ion Quantum Computing Daniel Klawson; Ming C. Wu 2025 Master's Thesis
Laser Chirp Linearization and Phase Noise Compensation for Frequency-modulated Continuous-wave LiDAR Xiaosheng Zhang 2021 Master's Thesis
Design and Analysis of Closed-loop Controlled Parallel-Plate Electrostatic MicroGrippers Patrick Breckow Chu; Kristofer S.J. Pister 1994 Master's Thesis
A Multi-Stage Micro-Tangential Flow Filtration System for BioMEMS Applications Patrick Pak-Ho Leung; Dorian Liepmann; Luke P. Lee; Liwei Lin 2002 Master's Thesis
On-Chip Thin Film Encapsulation Development Utilizing Porous Anodic Alumina Shell Nicolas Ferrier; Albert P. Pisano 2010 Master's Thesis
Solid Propellant Microrockets Dana Teasdale; Kristofer S.J. Pister; Albert P. Pisano 2000 Master's Thesis
Pyroelectric ZnO Integrated Sensors Dennis L. Polla; Richard S. Muller; Richard M. White 1985 Master's Thesis