Parametric Design and Characterization of Linear Microvibromotors

Resonant microactuators, such as electrostatic combdrives, have proven useful for many small amplitude actuation applications. However, there are a number of micropositioning applications that require a significantly larger travel range than the 10 pm typically achieved by electrostatic combdrives. In addition, once the input drive voltages are turned off, a combdrive returns to its equilibrium position. In many applications a "power-off stability'' is required in which the actuator maintains its position at the time of power cut-off. Finally, a microactuator used for micropositioning would typically require repeatable, submicron positioning precision. These are some of the design needs which drove the initial research into microscale impact actuators as well as the use of linear rnicrosliders.