Richard S. Muller

Job title: 
Professor Emeritus, Co-Founding Director BSAC
Electrical Engineering and Computer Sciences
Berkeley Sensor & Actuator Center (BSAC)

Richard S. Muller is a professor emeritus in the Department of Electrical Engineering at the University of California, Berkeley and Co-Founding Director of the Berkeley Sensor & Actuator Center. He joined the faculty at the University of California, Berkeley in 1962 where his research focus was on the physics of integrated circuit devices.

Together with Dr. T.I. Kamins of Hewlett-Packard Company, Professor Muller published Device Electronics for Integrated Circuits in 1977. In the late 1970s he began research in the area now known as MEMS, and with R.M. White founded the Berkeley Sensor & Actuator Center in 1986.

He successfully proposed that IEEE establish a New Journal in MEMS (1991). A member of the US National Academy of Engineering and an IEEE Life Fellow, he received the career MEMS Award at TRANSDUCERS ’97, as well as the IEEE Brunetti Award (1998 with R.T. Howe), a Fulbright Professorship, and a von Humboldt Research Award at TU Berlin in 1994. Other awards include the Berkeley Citation, the IEEE Millennium Medal, and the Renaissance Award from Stevens Institute of Technology. Professor Muller served as a Trustee of Stevens Institute of Technology from 1996 to 2005. In 2013, Professor Muller was a co-recipient of the IEEE/RSE/Wolfson, James Clerk Maxwell Award with Professor Richard White.

Professor Muller earned his M.S. and Ph.D. degrees in electrical engineering and physics from the California Institute of Technology.


Research interests: 

Integrated Circuits (INC)
Solid-State Devices
MEMS Micro-Optical Systems for Process Characterization
MEMS Biomedical Applications
MEMS Systems for Adaptive Optics

Richard S. Muller Fellowship

Fellowships are key to recruiting and supporting the most talented graduate students, whose work is central to Berkeley Engineering’s preeminence in research and teaching. In 2020, Prof. Richard S. Muller’s friends and former students established the Richard S. Muller Fellowship, to support a graduate student in Electrical Engineering & Computer Sciences.

A member of the EECS faculty since 1962, Prof. Muller is internationally known for his contributions to semiconductor device technology, including pioneering work in silicon sensors and actuators that helped launch the MEMS industry. Your gift to the Richard S. Muller Fellowship will pay tribute to his legacy of discovery and innovation, hallmarks of Berkeley Engineering. For information about the various ways you may make a tax-deductible gift, please click here or contact: 

Dale Masterson, Senior Director of Development
Engineering College Relations
(510) 643-5097