The damping in micromechanical single ended tuning fork resonators are investigated. Analytical models are built to simulate the effects of end damping, as in the case of an anchor, and material damping on the quality factor. Experimental structures which varied in length, base radius, and etch time are measured and correlated to the analytical model to determine which more accurately represents the measured results. The data shows that the material damping case better approximates experimental results.
In addition, longer etch times are attacking the grain boundaries causing greater internal friction which leads the more damping. Thus, the longer etch times lead to a reduction in the quality factor. Since etch time is effecting the surface microstructure of the resonators, this further demonstrates that material damping is the dominant loss mechanism in the tested structures.