PCB-Less Integration of a Robust Wireless MEMS Tactile Package

Creating a wireless tactile actuator the size of an aspirin will allow for more precise physical stimulation. This will lead to a more immersive virtual reality (VR) experience and better convey information via touch. Making this wireless tactile actuator can be accomplished by further utilizing the existing Si on Insulator (SOI) structure. Currently, a printed circuit board (PCB) is used for the sole purpose of assembly, however, further utilization of the Micro Electromechanical Systems (MEMS) SOI structure can allow the chip to operate as both the actuator and housing package. In addition, the MEMS Si could replace circuitry previously incorporated in eternal components: lateral relays replacing high voltage buffers. The assembly of electronics into a MEMS housing was found to require finer assembly tools, lateral SOI relays to control the MEMS devices showed a need for a more durable contact material, and fabrication methods to enhance MEMS robustness are presented. These are meant to enable a durable aspirin-sized package to controllably stimulate the human skin.