Publications

Title Author Yearsort ascending Publication type
Micromachined Photonic Devices and Systems on Silicon Michael Daneman; Kam Y. Lau; Richard S. Muller; Albert P. Pisano 1996 Ph.D. Dissertation
Design Issues For Differential Z-Axis Accelerometers Monico Ortiz; Bernhard E. Boser; Roger T. Howe 1996 Master's Thesis
MEMS Design via Automated Synthesis, Extraction, and Simulation Hee Jung Lee; Kristofer S.J. Pister 1996 Master's Thesis
Permeable Polysilicon Etch-Access Windows for Microshell Fabrication Kyle Lebouitz 1996 Master's Thesis
HexSil Micro Disk Drive Arm Roel Dieron; Albert P. Pisano; Roberto Horowitz 1996 Master's Thesis
An Investigation of MEMS Anchor Design for Optimal Stiffness and Damping Daniel Sherman; Albert P. Pisano; George C. Johnson; Panayiotis Papadopoulos 1996 Master's Thesis
Development of a Free-Space Optical Switch for Fiber Communications Based on Actuated, Silicon Surface-Micromachined Mirrors Alois Friedberger; Richard S. Muller 1996 Master's Thesis
Micromachined Piezoelectric Cantilever Transducers Seung Lee; Richard M. White; George C. Johnson; Fai Ma; David S. Soane 1995 Ph.D. Dissertation
Thermally-Driven Angular Rate Sensors in Standard CMOS Michael Dean Pottenger 1995 Master's Thesis
A Micromachined Vibrating Ring Gyroscope Michael William Putty; Khalil Najafi; Kensall D. Wise; Stella W. Pang; Noel Perkins 1995 Ph.D. Dissertation
Surface Micromachined Resonant Force Transducers Trey Roessig; Albert P. Pisano; George C. Johnson; Lisa Pruitt 1995 Master's Thesis
CMOS Based Chemical Sensors Dharmesh Bhalchandra Jani; Kristofer S.J. Pister 1995 Master's Thesis
Xenon Difluoride Etching of Silicon for MEMS Floy I-Jung Chang; Kristofer S.J. Pister 1995 Master's Thesis
Ultrasonic Microtransport Richard M. Moroney III; Richard M. White 1995 Ph.D. Dissertation
Design, Fabrication, Position Sensing, and Control of Electrostatic, Surface-Micromachined Polysilicon Microactuators Patrick Ching-Pak Cheung; Roberto Horowitz; Roger T. Howe; Albert P. Pisano 1995 Ph.D. Dissertation
The Damping Mechanism in Single-Ended Tuning Fork Resonant Structures Gonnan K. Leung; Roger T. Howe 1995 Master's Thesis
A Micro-Electro-Mechanical Systems (MEMS) Device to Measure the Fracture Strain of Polycrystalline Silicon Peter Truxtun Jones; Roger T. Howe 1995 Master's Thesis
Micromechanical Signal Processors Clark T.-C. Nguyen; Roger T. Howe 1994 Ph.D. Dissertation
Design and Implementation of Sigma-Delta Force-Balance Microaccelerometers Crist Lu; Bernhard E. Boser; Roger T. Howe 1994 Master's Thesis
Simulation of Microelectromechanical Systems Gary Fedder; Roger T. Howe 1994 Ph.D. Dissertation
Magnetic Microactuators with Polysilicon Flexures Jack William Judy; Richard S. Muller; Seth Sanders 1994 Master's Thesis
A Silicon-Based Microsensor to Measure Airborne Contaminants Bharat M. Shah; Richard M. White; Albert P. Pisano 1994 Master's Thesis
SPICE Analysis of a Micro Gyro and Mixed Analog-Digital Sensor Interface Circuit Amit Burstein; Chand R. Viswanathan; Kristofer S.J. Pister; William H. Kaiser 1994 Master's Thesis
Design and Analysis of Closed-loop Controlled Parallel-Plate Electrostatic MicroGrippers Patrick Breckow Chu; Kristofer S.J. Pister 1994 Master's Thesis
Micromachined Piezoelectric Microphones Robert P. Ried; Richard S. Muller 1994 Ph.D. Dissertation
Micromechanisms Using Sidewall Beams Michael Judy; Roger T. Howe 1994 Ph.D. Dissertation
Micromechanical Investigations of Silicon and Ni-Ti-Cu Thin Films Peter Krulevitch; George C. Johnson; Roger T. Howe; Kyriakos Kornvopoulos 1994 Ph.D. Dissertation
Gel-coated FPW Biosensors Amy Wang; Richard M. White 1993 Master's Thesis
Biochemical Microflow System / Microfabricated Optical Chopper Michael T. Ching; Richard M. White; Albert P. Pisano 1993 Master's Thesis
Modulated Infrared Source Peter Yung-Sen Chen; Richard S. Muller; Roger T. Howe 1993 Master's Thesis
Piezoresistive Sensing in Micromechanical Resonators Yorgen H. Anderson; Richard S. Muller; Richard M. White 1993 Master's Thesis
Selective Encapsulations of MEMS: Micro Channels, Needles, Resonators and Electromechanical Filters Liwei Lin; Albert P. Pisano; Roger T. Howe; Van P. Carey 1993 Ph.D. Dissertation
Large Displacement Electrostatic Microactuators With Polysilicon Flexure Suspensions Reid Alyn Brennen; Albert P. Pisano; Roger T. Howe; Homayoon Kazerooni 1993 Ph.D. Dissertation
Controlled Structure Release for Silicon Surface Micromachining David Monk; David S. Soane; Roger T. Howe; David B. Graves 1993 Ph.D. Dissertation
High-Senstivity Micromechanical Electrostatic Voltmeter David Loconto; Richard S. Muller; Roger T. Howe 1992 Master's Thesis
A Surface Micromachined Accelerometer with Integrated CMOS Detection Circuitry Weijie Yun; Roger T. Howe 1992 Ph.D. Dissertation
Hinged Polysilicon Structures with Integrated CMOS Thin Film Transistors Kristofer S.J. Pister; Roger T. Howe 1992 Ph.D. Dissertation
Impact Actuation of Polysilicon Micromechanical Structures Abraham Lee; Albert P. Pisano; Roger T. Howe 1992 Ph.D. Dissertation
Fabrication of Exposed Gate Field Effect Transistors for Sensor Applications Albert William Flounders; Dennis W. Hess 1992 Ph.D. Dissertation
A Curved Teeth Flexible Comb Drive for Electrostatic Microgrippers Ken Chow 1992 Master's Thesis
Applications of Ultrasonic Lamb Waves Stuart Wenzel; Richard M. White 1992 Ph.D. Dissertation
The Optimal Kinematic Synthesis of Planar, Full Cycle, Constant-Velocity, Straight-Line Mechanisms Peter Hall Hodges; Albert P. Pisano 1991 Ph.D. Dissertation
Silicon Electromechanical Microgrippers: Design, Fabrication, and Testing Chang-Jin Kim; Albert P. Pisano; Richard S. Muller 1991 Ph.D. Dissertation
Microstructure Micropackaging Kristen M. McNair; Roger T. Howe; Richard M. White 1991 Master's Thesis
Fluid-Actuated Micromachined Rotors and Gears Leslie A. Field; Richard M. White 1991 Ph.D. Dissertation
Growth Stresses in Undoped LPCVD Polycrystalline Silicon Films Peter Krulevitch 1991 Master's Thesis
The Motion of a Pointer Tip Driven by Two Linked Electrostatic Comb Drives Ronald Fox 1991 Master's Thesis
Electromechanical Characterization of Microresonators for Circuit Applications Clark T.-C. Nguyen; Roger T. Howe 1991 Master's Thesis
Miniature Gaseous Light Sources Hsi-Jen Yeh; Richard S. Muller; Roger T. Howe 1991 Master's Thesis
Micromechanical Electrostatic Voltmeter Charles Heng-Yuan Hsu; Richard S. Muller; Roger T. Howe 1991 Master's Thesis