2-DOF Actuated Micromirror Designed for Large DC Deflection


A 2 degree-of-freedom micromirror has been designed and fabricated in MCNC’s Multi-User MEMS Process (MUMPS). The structure uses thermal actuators to actuate both degrees of freedom. We have demonstrated actuator-controlled DC deflection of up to 28 degrees (56 degrees optical) in the axis of rotation that lies parallel to the substrate, and up to 11 degrees (22 degrees optical) in the axis of rotation perpendicular to the substrate. The force-redirecting linkage has been shown to be able to deflect the mirror more than 45 degrees (90 degrees optical) using a probe tip to provide actuation. 

Publication date: 
September 1, 1999
Publication type: 
Conference Paper (Proceedings)
MOEMS 99: Proceedings : 3rd International Conference on Micro Opto Electro Mechanical Systems, Optical MEMS : August 31 - September 1, 1999, Mainz Hilton, Mainz, Germany. (1999). Germany: IMM. pp. 239-244

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