Technical Reports

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CMOS Based Chemical Sensors

Dharmesh Bhalchandra Jani; Kristofer S.J. Pister
Master's Thesis, 1995

Xenon Difluoride Etching of Silicon for MEMS

Floy I-Jung Chang; Kristofer S.J. Pister
Master's Thesis, 1995

A Micro-Electro-Mechanical Systems (MEMS) Device to Measure the Fracture Strain of Polycrystalline Silicon

Peter Truxtun Jones; Roger T. Howe
Master's Thesis, 1995

Ultrasonic Microtransport

Richard M. Moroney III; Richard M. White
Ph.D. Dissertation, 1995

Design, Fabrication, Position Sensing, and Control of Electrostatic, Surface-Micromachined Polysilicon Microactuators

Patrick Ching-Pak Cheung; Roberto Horowitz; Roger T. Howe; Albert P. Pisano
Ph.D. Dissertation, 1995

The Damping Mechanism in Single-Ended Tuning Fork Resonant Structures

Gonnan K. Leung; Roger T. Howe
Master's Thesis, 1995

Micromechanical Signal Processors

Clark T.-C. Nguyen; Roger T. Howe
Ph.D. Dissertation, 1994

Design and Implementation of Sigma-Delta Force-Balance Microaccelerometers

Crist Lu; Bernhard E. Boser; Roger T. Howe
Master's Thesis, 1994

Simulation of Microelectromechanical Systems

Gary Fedder; Roger T. Howe
Ph.D. Dissertation, 1994

Magnetic Microactuators with Polysilicon Flexures

Jack William Judy; Richard S. Muller; Seth Sanders
Master's Thesis, 1994

A Silicon-Based Microsensor to Measure Airborne Contaminants

Bharat M. Shah; Richard M. White; Albert P. Pisano
Master's Thesis, 1994

Micromachined Piezoelectric Microphones

Robert P. Ried; Richard S. Muller
Ph.D. Dissertation, 1994

SPICE Analysis of a Micro Gyro and Mixed Analog-Digital Sensor Interface Circuit

Amit Burstein; Chand R. Viswanathan; Kristofer S.J. Pister; William H. Kaiser
Master's Thesis, 1994

Design and Analysis of Closed-loop Controlled Parallel-Plate Electrostatic MicroGrippers

Patrick Breckow Chu; Kristofer S.J. Pister
Master's Thesis, 1994

Micromechanisms Using Sidewall Beams

Michael Judy; Roger T. Howe
Ph.D. Dissertation, 1994

Micromechanical Investigations of Silicon and Ni-Ti-Cu Thin Films

Peter Krulevitch; George C. Johnson; Roger T. Howe; Kyriakos Kornvopoulos
Ph.D. Dissertation, 1994

Biochemical Microflow System / Microfabricated Optical Chopper

Michael T. Ching; Richard M. White; Albert P. Pisano
Master's Thesis, 1993

Modulated Infrared Source

Peter Yung-Sen Chen; Richard S. Muller; Roger T. Howe
Master's Thesis, 1993

Piezoresistive Sensing in Micromechanical Resonators

Yorgen H. Anderson; Richard S. Muller; Richard M. White
Master's Thesis, 1993

Gel-coated FPW Biosensors

Amy Wang; Richard M. White
Master's Thesis, 1993

Large Displacement Electrostatic Microactuators With Polysilicon Flexure Suspensions

Reid Alyn Brennen; Albert P. Pisano; Roger T. Howe; Homayoon Kazerooni
Ph.D. Dissertation, 1993

Selective Encapsulations of MEMS: Micro Channels, Needles, Resonators and Electromechanical Filters

Liwei Lin; Albert P. Pisano; Roger T. Howe; Van P. Carey
Ph.D. Dissertation, 1993

Controlled Structure Release for Silicon Surface Micromachining

David Monk; David S. Soane; Roger T. Howe; David B. Graves
Ph.D. Dissertation, 1993

High-Senstivity Micromechanical Electrostatic Voltmeter

David Loconto; Richard S. Muller; Roger T. Howe
Master's Thesis, 1992

A Surface Micromachined Accelerometer with Integrated CMOS Detection Circuitry

Weijie Yun; Roger T. Howe
Ph.D. Dissertation, 1992

Hinged Polysilicon Structures with Integrated CMOS Thin Film Transistors

Kristofer S.J. Pister; Roger T. Howe
Ph.D. Dissertation, 1992

Impact Actuation of Polysilicon Micromechanical Structures

Abraham Lee; Albert P. Pisano; Roger T. Howe
Ph.D. Dissertation, 1992

Applications of Ultrasonic Lamb Waves

Stuart Wenzel; Richard M. White
Ph.D. Dissertation, 1992

The Optimal Kinematic Synthesis of Planar, Full Cycle, Constant-Velocity, Straight-Line Mechanisms

Peter Hall Hodges; Albert P. Pisano
Ph.D. Dissertation, 1991

Silicon Electromechanical Microgrippers: Design, Fabrication, and Testing

Chang-Jin Kim; Albert P. Pisano; Richard S. Muller
Ph.D. Dissertation, 1991

Microstructure Micropackaging

Kristen M. McNair; Roger T. Howe; Richard M. White
Master's Thesis, 1991

Fluid-Actuated Micromachined Rotors and Gears

Leslie A. Field; Richard M. White
Ph.D. Dissertation, 1991

Miniature Gaseous Light Sources

Hsi-Jen Yeh; Richard S. Muller; Roger T. Howe
Master's Thesis, 1991

Electromechanical Characterization of Microresonators for Circuit Applications

Clark T.-C. Nguyen; Roger T. Howe
Master's Thesis, 1991

Micromechanical Electrostatic Voltmeter

Charles Heng-Yuan Hsu; Richard S. Muller; Roger T. Howe
Master's Thesis, 1991

Design, Fabrication, and Optimization of Micromechanical Flexures

Young-Ho Cho; Albert P. Pisano; Roger T. Howe
Ph.D. Dissertation, 1990

Thermal Applications of Microbridges

Carlos Mastrangelo; Richard S. Muller
Ph.D. Dissertation, 1990

Integrated Microphone with CMOS Circuits on a Single Chip

Eun Sok Kim; Richard S. Muller
Ph.D. Dissertation, 1990

Electrostatic Comb Drive for Resonant Sensor and Actuator Applications

William C.-K. Tang; Roger T. Howe
Master's Thesis, 1990

Polysilicon Microstructures to Characterize State Friction

Martin Lim; Roger T. Howe; Roberto Horowitz
Master's Thesis, 1990

Integrated Micromachinery -- Moving Structures on Silicon Chips

Long-Sheng Fan; Richard S. Muller
Ph.D. Dissertation, 1990

Formation, Properties, and Applications of Porous Silicon

Rolfe Anderson; Richard S. Muller
Ph.D. Dissertation, 1990

IC-Processed Polysilicon Micromechanics: Technology, Material, and Devices

Yu-Chong Tai; Richard S. Muller; Roger T. Howe
Ph.D. Dissertation, 1989

Analysis and Characterization of the Vertical Carrier Domain Magnetometer

Bret S. Burns; Richard S. Muller; Roger T. Howe
Master's Thesis, 1989

Low Temperature Silicon-Silicon Bonding with Oxides

Leslie A. Field; Richard S. Muller
Master's Thesis, 1988

Reactive Ion Etching of Zinc Oxide and Indium-Tin-Oxide

Eric Minami; Richard M. White; Roger T. Howe
Master's Thesis, 1988

Design, Theory, and Applications of Integrable Carrier-Domain Magnetometers

Juan Goicolea; Richard S. Muller
Ph.D. Dissertation, 1986

Pyroelectric ZnO Integrated Sensors

Dennis L. Polla; Richard S. Muller; Richard M. White
Master's Thesis, 1985

Integrated Silicon Electromechanical Vapor Sensor

Roger T. Howe; Richard S. Muller; Richard M. White
Ph.D. Dissertation, 1984

Integrated-Circuit-Compatible Electret and Condenser Ultrasonic Transducers

Jonathan Bernstein; Richard M. White
Ph.D. Dissertation, 1983