A novel microactuator technology that combines magnetic thin films with polysilicon flexural structures is described. Micromechanical structures, actuated by an off-chip magnetic field, are constructed in a batch-fabrication process that combines electroplatingwith conventional lithography, materials, and equipment. A microactuator consisting of a 400x(47-40)x7μm^3 rectangular plate of NiFe attached to a 400x(0.9-1.4)x2.25μm^3 polysilicon beam has been displaced by 1.2 mm, rotated by 180°, and actuated with ~0.2 nNmof torque. Theoretical expressions for the displacement and torque are developed andcompared to experimental results. This new microactuation technology has potentialapplications to micromanipulators, microgrippers, magnetometers and microphotonic systems.
August 30, 1994
Judy, J. W. (1994). Magnetic Microactuators with Polysilicon Flexures: Research Project. United States: University of California, Berkeley.