Design and Analysis of Closed-loop Controlled Parallel-Plate Electrostatic MicroGrippers


This work describes the design and analysis of a class of sub-millimeter scale grippers. These electrostatically-driven devices are fabricated from polysilicon using an IC-based surface micromachining process and have been designed to handle objects with dimensions in the range of 10 to 100 um. Manipulation of substantially larger objects (up to perhaps 1mm^3) should be possible with similarly designed grippers. The bulk of this work describes the nonlinear modeling, analysis, and simulation of the electrostatic microgripper, both with and without a stabilizing feedback controller. Measurements of the open-loop system are consistent with the system model. (This thesis, along with device layout and simulation files, is available by anonymous ftp from

Patrick Breckow Chu
Publication date: 
May 31, 1994
Publication type: 
Master's Thesis
Chu, P. B. (1994). Design and Analysis of Closed-loop Controlled Parallel-plate Electrostatic Microgrippers. (n.p.): University of California, Los Angeles.

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