This work describes the design and analysis of a class of sub-millimeter scale grippers. These electrostatically-driven devices are fabricated from polysilicon using an IC-based surface micromachining process and have been designed to handle objects with dimensions in the range of 10 to 100 um. Manipulation of substantially larger objects (up to perhaps 1mm^3) should be possible with similarly designed grippers. The bulk of this work describes the nonlinear modeling, analysis, and simulation of the electrostatic microgripper, both with and without a stabilizing feedback controller. Measurements of the open-loop system are consistent with the system model. (This thesis, along with device layout and simulation files, is available by anonymous ftp from synergy.icsl.ucla.edu.)
May 31, 1994
Chu, P. B. (1994). Design and Analysis of Closed-loop Controlled Parallel-plate Electrostatic Microgrippers. (n.p.): University of California, Los Angeles.