Technical Reports

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Ultra-Deep Reactive Ion Etching for Silicon Wankel Internal Combustion Engines

Aaron Knobloch; Albert P. Pisano; Carlos Fernandez-Pello; Seth Sanders
Ph.D. Dissertation, 2003

Polycrystalline Silicon-Germanium Contact Resistance Study for Integrated MEMS Technology

Marie-Ange Eyoum; Tsu-Jae King; Roger T. Howe
Master's Thesis, 2003

Ultra-Low Energy Architectures and Circuits for Cubic Millimeter Distributed Wireless Sensor Networks

Brett Warneke; Kristofer S.J. Pister; Jan M. Rabaey; Paul K. Wright
Ph.D. Dissertation, 2003

Apex Seal Design for the Mems Rotary Engine Power System

Fabian Martinez; Albert P. Pisano; Carlos Fernandez-Pello
Master's Thesis, 2003

Capacitive Position-Sensing Interface for Micromachined Inertial Sensors

Xuesong Jiang; Bernhard E. Boser; Roger T. Howe; Roberto Horowitz
Ph.D. Dissertation, 2003

Surface Engineering for MEMS Reliability

William Ashurst; Roya Maboudian; David B. Graves; Roger T. Howe
Ph.D. Dissertation, 2003

Microfluidic Accumulator Driven by Capillary Forces

Eric Hobbs; Albert P. Pisano; Liwei Lin; Roya Maboudian
Master's Thesis, 2003

Silicon to Steel, Rapid Bonding

Theodore Prescop; Albert P. Pisano; Liwei Lin
Master's Thesis, 2003

Water-Powered Microfluidic Devices for Diagnostic and Drug Delivery Systems

Yu-Chuan Su; Liwei Lin; Albert P. Pisano; Luke P. Lee
Ph.D. Dissertation, 2003

A Solar-Powered, Milligram Prototype Robot from a Three-Chip Process

Seth Hollar; Kristofer S.J. Pister; Albert P. Pisano; Roger T. Howe; Richard M. White
Ph.D. Dissertation, 2003

Pressure Driven Microflow Through a Double-T Metering Section

Luke Hunter; Albert P. Pisano; Liwei Lin
Master's Thesis, 2003

A Multi-Stage Micro-Tangential Flow Filtration System for BioMEMS Applications

Patrick Pak-Ho Leung; Dorian Liepmann; Luke P. Lee; Liwei Lin
Master's Thesis, 2002

MEMS Based Capillary Pumped Loops for Integral Thermal Management

Kip Pettigrew; Dorian Liepmann; Luke P. Lee; Ralph Grief
Master's Thesis, 2002

Assembly and Molding Processes for Three-Dimensional Microfabrication

Elliot Hui; Roger T. Howe; Kristofer S.J. Pister; Dorian Liepmann
Ph.D. Dissertation, 2002

An Integrated MEMS Syringe for Advanced Drug Delivery: Design, Fabrication and Fluid Mechanics of Suspension Flow through Microneedle Arrays

Boris Stoeber; Dorian Liepmann; Albert P. Pisano; Luke P. Lee
Ph.D. Dissertation, 2002

Ultrasonic Microdevices for Integrated On-Chip Biological Sample Processing

George Dougherty; Timothy Sands; Eugene Haller; Albert P. Pisano
Ph.D. Dissertation, 2002

Microsystems for Electrostatic Sensing

Patrick Riehl; Richard S. Muller
Ph.D. Dissertation, 2002

Integrated Surface Micromachined Frame Microgyroscopes

Moorthi Palaniapan; Roger T. Howe; Albert P. Pisano; Roberto Horowitz
Ph.D. Dissertation, 2002

Integrated Micromechanical Resonant Sensors for Inertial Measurement Systems

Ashwin Seshia; Roger T. Howe; Bernhard E. Boser; Kristofer S.J. Pister; Roberto Horowitz
Ph.D. Dissertation, 2002

An SOI Process for Integrated Solar Power, Circuitry and Actuators for Autonomous Microelectromechanical Systems

Colby Bellew; Albert P. Pisano
Ph.D. Dissertation, 2002

Effect of Devitrification Temperature on the Microstructure of NiTi Films

Michael Vestel; Ronald Gronsky; Albert P. Pisano
Ph.D. Dissertation, 2002

Microscale and Nanoscale Neural Interfaces

Karen Chihrnin Cheung; Luke P. Lee; Rajendra Bhatnagar; Yang Dan; Albert P. Pisano
Ph.D. Dissertation, 2002

Micromachined Mirrors

Robert Conant; Richard S. Muller; Kristofer S. J. Pister; Liwei Lin
Ph.D. Dissertation, 2002

Micromirror Arrays for Adaptive Optics

Michael Helmbrecht; Richard S. Muller
Ph.D. Dissertation, 2002

Hybrid Surface-/Bulk-Micromachining Processes for Scanning Micro-Optical Components

Jocelyn Nee; Kam Y. Lau; Richard S. Muller; Paul Wright
Ph.D. Dissertation, 2001

Immunosensor: A CMOS/MEMS-Based Protein Sensor

Bernhard E. Boser; Richard M. White; P. Robert Beatty; Eva Harris
Master's Thesis, 2001

Experimental Results of Miniature Rotary Internal Combustion Engines

Aaron Knobloch; Carlos Fernandez-Pello; Dorian Liepmann
Master's Thesis, 2001

Microfabricated Parylene Microneedles and Pneumatic/Hydraulic Actuators for Use in Interventional, Transvascular Drug Delivery

Kirk Seward; Albert P. Pisano; Kristofer S.J. Pister; Liwei Lin
Ph.D. Dissertation, 2001

Design and Fabrication of PZT-Actuated Silicon Suspensions for Hard Disk Drives

Tsung-Lin Chen; Roberto Horowitz; Roger T. Howe; Albert P. Pisano
Ph.D. Dissertation, 2001

Miniature-Scale and Micro-Scale Rotary Internal Combustion Engines for Portable Power Systems

Kelvin Fu; A. Carlos Fernandez-Pello; Albert P. Pisano; Kristofer J. Pister; Dorian Liepmann
Ph.D. Dissertation, 2001

Microfiltration and Flexural Plate Wave Devices

Pamela Caton; Richard M. White
Ph.D. Dissertation, 2001

Scanning Blazed Gratings

Kristine Marie Rosfjord; Kam Y. Lau; Richard S. Muller
Master's Thesis, 2001

Microfabricated Microneedles for Minimally Invasive Drug Delivery, Sampling and Analysis

Jeffrey Zahn; Dorian Liepmann; Albert P. Pisano; Frank Tendick
Ph.D. Dissertation, 2001

Bubble-Actuated Planar Microvalves

Alexandros Papavasiliou; Albert P. Pisano; Dorian Liepmann; Luke P. Lee
Ph.D. Dissertation, 2001

A Large-Displacement Out-of-Plane SOI Actuator for Applications in Confocal Microscopy

Christopher Rulon Bowes-Lyon Ellis; Luke P. Lee; Roger T. Howe
Master's Thesis, 2001

Micromachined Resonators

Dubravka Bilić; Roger T. Howe; Kristofer S. J. Pister; Roberto Horowitz
Ph.D. Dissertation, 2001

Microresonators as Vacuum Gauges

Sharon Oh; Roger T. Howe; Liwei Lin
Master's Thesis, 2001

Articulated Mechanisms and Electrostatic Actuators for Autonomous Microrobots

Richard Yeh; Kristofer S.J. Pister; Roger T. Howe; Dorian Liepmann
Master's Thesis, 2001

Sputter Deposition of Piezoelectric Lead Zirconate Titanate Thin Films for Use in MEMS Sensors and Actuators

Clifford Frederick Knollenberg; Timothy D. Sands; Richard M. White; Eugene, E. Haller
Master's Thesis, 2001

Control of Fluids in Microscale Devices

Michael James DeBar; Dorian Liepmann; Albert P. Pisano; Richard M. White
Ph.D. Dissertation, 2001

Polycrystalline Silicon Germanium for Fabrication, Release, and Packaging of Microelectromechanical Systems

John Heck; Roger T. Howe; Tsu-Jae King; George Johnson
Ph.D. Dissertation, 2001

Fluidic Self-Assembly of Microfabricated Parts to Substrates Using Capillary Forces

Uthara Srinivasan; Roger T. Howe; Dorian Liepmann; Susan J. Muller; Jeffery A. Reimer
Ph.D. Dissertation, 2001

Continuous Microfluidic Mixing Using Pulsatile Micropumps

Ajay Anil Deshmukh; Dorian Liepmann; Albert P. Pisano; Luke P. Lee
Ph.D. Dissertation, 2001

Fluidic Microsystems Fabricated in Epoxy

Nelson Kuan; Albert P. Pisano; Dorian Liepmann; Susan J. Muller
Ph.D. Dissertation, 2001

Mechanical Analysis and Design of Vibratory Micromachined Gyroscopes

Wyatt Davis; Albert P. Pisano; Oliver M. O'Reilly; Kristofer S.J. Pister
Ph.D. Dissertation, 2001

Micro-Fabricated Shells for Mechanical and Fluidic Interconnects

Phillip Stupar; Albert P. Pisano; Liwei Lin; Luke P. Lee
Ph.D. Dissertation, 2001

A High-Resolution Resonant MEMS Strain Gauge

Mark Wolfson; Albert P. Pisano; Roger T. Howe; Oliver M. O'Reiily
Master's Thesis, 2000

Micromachined Electrodes for High Performance Capacitive Pressure Sensors

Vikram Shenoy; Roger T. Howe; Liwei Lin
Master's Thesis, 2000

Polycrystalline Silicon-Germanium Films for Integrated Microsystems

Andrea Franke; Tsu-Jae King; Roger T. Howe; Timothy Sands
Ph.D. Dissertation, 2000

Adaptive Control Strategies for MEMS Gyroscopes

Sungsu Park; Roberto Horowitz; Roger T. Howe; Bernhard E. Boser
Ph.D. Dissertation, 2000