Technical Reports

*Only registered BSAC Industrial Members may view project materials & publications. Click here to request member-only access.

Fatigue of Polycrystilline Silicon in MEMS Devices

Angela S. Choy; Kyriakos Komvopoulos; Albert P. Pisano; Roger T. Howe
Master's Thesis, 1999

Biological Applications of Micromachined Ultrasonic Flexural Plate-Wave Technology

Audra Hsien-I Meng; Richard M. White; Rajendra Bhatnagar; Albert P. Pisano
Ph.D. Dissertation, 1999

The Fracture Strength of Brittle Films for Micro-Electro-Mechanical Systems (MEMS) Devices

Peter Truxtun Jones; George C. Johnson; Roger T. Howe; Lisa A. Pruitt
Ph.D. Dissertation, 1999

Micromachined Resonant Electrometer

Patrick Riehl; Richard S. Muller; Roger T. Howe
Master's Thesis, 1999

Design and Modeling of a Dual Mass SOI-MEMS Gyroscope

Ashwin Seshia; Roger T. Howe; Kristofer S.J. Pister
Master's Thesis, 1999

Microrelay Design, Performance, and Systems

Ezekiel Kruglick; Kristofer S.J. Pister; Roger T. Howe; Richard M. White; Dorian Liepmann
Ph.D. Dissertation, 1999

Integrated Mesoscopic Fluidic Interconnects for Micro-Machined Fluidic Devices

Jennifer Ann Scalf; Albert P. Pisano; Dorian Liepmann
Master's Thesis, 1999

Polysilicon Micromolding of Closed-Flow Passages for the Fabrication of Multifunctional Microneedles

Neil Hamilton Talbot; Albert P. Pisano; Dorian Liepmann; Richard S. Muller
Master's Thesis, 1999

Algorithms for Distributed Sensor Networks

James D. McLurkin; Kristofer S. J. Pister
Master's Thesis, 1999

Planar Microfluidics: Toward Large Scale Integration of Channels, Pumps, Valves, and Fluid Mixers in Microelectromechanical Systems (MEMS)

John Evans; Dorian Liepmann; Albert P. Pisano; Roger T. Howe
Ph.D. Dissertation, 1999

MicroElectroMechanical Devices and Fabrication Technologies for Radio-Frequency Analog Signal Processing

Darrin Young; Bernhard E. Boser; Robert G. Meyer; Albert P. Pisano
Ph.D. Dissertation, 1999

An SOI Based, Fully Integrated Fabrication Process for High-Aspect-Ratio Microelectromechanical Systems

Timothy Brosnihan; Albert P. Pisano; Roger T. Howe; David Dornfeld
Ph.D. Dissertation, 1998

MEMS Microshells for Microneedles, Microscale Fluid Visualization, and Vacuum Packaging of Microdevices

Kyle Lebouitz; Albert P. Pisano; Roger T. Howe; Dorian Liepmann
Ph.D. Dissertation, 1998

Assembly Techniques for Microelectromechanical Systems

Michael B. Cohn; Roger T. Howe
Ph.D. Dissertation, 1998

MEMS Barcode Reader

James Teng; Richard S. Muller; Kam Y. Lau
Master's Thesis, 1998

Position Sensing for Electrostatic Micropositioners

Naiyavudhi Wongkomet; Bernhard E. Boser; Paul R. Gray; Albert A. Pisano
Ph.D. Dissertation, 1998

The Development of Lead Zirconate Titanate Thin Films for Piezoelectric Microactuators

Annabel Susan Nickles; Eugene E. Haller; Richard M. White; Timothy D. Sands
Ph.D. Dissertation, 1998

Adaptive Servo Schemes using Micromachined Accelerometers for Increased Disturbance Rejection for Magnetic Hard Disk Drives

Satinderpall Pannu; Roberto Horowitz; Albert P. Pisano; Roger T. Howe
Ph.D. Dissertation, 1998

Microfabricated Silicon High Aspect Ratio Flexures for In-Plane Motion

Christopher Guild Keller; Roger T. Howe; John W. Morris, Jr.; Kristofer S.J. Pister; Timothy D. Sands
Ph.D. Dissertation, 1998

Microfabricated Electrostatic Actuators for Magnetic Disk Drives

David A. Horsley; Albert P. Pisano; Roberto Horowitz; Roger T. Howe
Ph.D. Dissertation, 1998

Integrated MEMS Tuning Fork Oscillators for Sensor Applications

Trey Roessig; Albert P. Pisano; Kameshwar Poolla; Roger T. Howe
Ph.D. Dissertation, 1998

A Magnetically Actuated Scanning Microplatform for Intravascular Ultrasound Imaging

Carl Chang; Richard S. Muller
Master's Thesis, 1998

Micro-Optical Devices for Communications and Beyond

Meng-Hsiung Kiang; Kam Y. Lau; Richard S. Muller; Raymond Y. Chiao
Ph.D. Dissertation, 1998

Micromechanical Power Conversion

J. Mark Noworolski; Seth Sanders; Roger T. Howe; Albert P. Pisano
Ph.D. Dissertation, 1998

Micromachined Vibratory Rate Gyroscopes

William A. Clark; Roger T. Howe
Ph.D. Dissertation, 1997

A Micromachined Acoustic Immunosensor for the Detection of Breast Cancer Antigens

Amy Wang; Richard M. White
Ph.D. Dissertation, 1997

Micromachined Dual Input Axis Rate Gyroscope

Thor Juneau; Albert P. Pisano; Roger T. Howe; Roberto Horowitz
Ph.D. Dissertation, 1997

Thin Film Zinc Oxide Microsensors and Microactuators

Don DeVoe; Albert P. Pisano; Roger T. Howe; Tim Sands
Ph.D. Dissertation, 1997

Micromachined Gyroscope with Integrated Electronics

Per Ljung; Albert P. Pisano; Roger T. Howe; Andrew K. Packard
Ph.D. Dissertation, 1997

Micro Accelerometer Design with Digital Feedback Control

Mark Lemkin; David M. Auslander; Bernhard E. Boser; Albert P. Pisano
Ph.D. Dissertation, 1997

Parametric Design and Characterization of Linear Microvibromotors

Roger Hipwell; Albert P. Pisano; Richard S. Muller; Oliver M. O'Reilly
Master's Thesis, 1997

Micromachined Hot-Filament Vacuum Devices

Kirt R. Williams; Richard S. Muller
Ph.D. Dissertation, 1997

Jewel Bearings for Micro Disk Drives

Kelly Yang; Albert P. Pisano
Master's Thesis, 1996

Micromachined Silicon Ultrasonic Longitudinal Mode Actuators: Theory and Applications to Surgery, Pumping, and Atomization

Amit Lal; Richard M. White
Ph.D. Dissertation, 1996

Surface Treatments for Adhesion Reduction in Polysilicon Micromechanical Devices

Michael Robert Houston; Roya Maboudian; Roger T. Howe; David B. Graves
Ph.D. Dissertation, 1996

Batch-Fabricated Ferromagnetic Microactuators with Silicon Flexures

Jack William Judy; Richard S. Muller; Richard M. White; Timothy D. Sands
Ph.D. Dissertation, 1996

A High-Voltage Charge Pump in Bulk CMOS

Eugene Lau Cheung; Bernhard Boser; Albert P. Pisano
Master's Thesis, 1996

Micromachined Photonic Devices and Systems on Silicon

Michael Daneman; Kam Y. Lau; Richard S. Muller; Albert P. Pisano
Ph.D. Dissertation, 1996

Design Issues For Differential Z-Axis Accelerometers

Monico Ortiz; Bernhard E. Boser; Roger T. Howe
Master's Thesis, 1996

HexSil Micro Disk Drive Arm

Roel Dieron; Albert P. Pisano; Roberto Horowitz
Master's Thesis, 1996

An Investigation of MEMS Anchor Design for Optimal Stiffness and Damping

Daniel Sherman; Albert P. Pisano; George C. Johnson; Panayiotis Papadopoulos
Master's Thesis, 1996

Development of a Free-Space Optical Switch for Fiber Communications Based on Actuated, Silicon Surface-Micromachined Mirrors

Alois Friedberger; Richard S. Muller
Master's Thesis, 1996

Surface Micromachined Resonant Force Transducers

Trey Roessig; Albert P. Pisano; George C. Johnson; Lisa Pruitt
Master's Thesis, 1995

Micromachined Piezoelectric Cantilever Transducers

Seung Lee; Richard M. White; George C. Johnson; Fai Ma; David S. Soane
Ph.D. Dissertation, 1995

CMOS Based Chemical Sensors

Dharmesh Bhalchandra Jani; Kristofer S.J. Pister
Master's Thesis, 1995

Xenon Difluoride Etching of Silicon for MEMS

Floy I-Jung Chang; Kristofer S.J. Pister
Master's Thesis, 1995

Ultrasonic Microtransport

Richard M. Moroney III; Richard M. White
Ph.D. Dissertation, 1995

The Damping Mechanism in Single-Ended Tuning Fork Resonant Structures

Gonnan K. Leung; Roger T. Howe
Master's Thesis, 1995

Design, Fabrication, Position Sensing, and Control of Electrostatic, Surface-Micromachined Polysilicon Microactuators

Patrick Ching-Pak Cheung; Roberto Horowitz; Roger T. Howe; Albert P. Pisano
Ph.D. Dissertation, 1995

A Micro-Electro-Mechanical Systems (MEMS) Device to Measure the Fracture Strain of Polycrystalline Silicon

Peter Truxtun Jones; Roger T. Howe
Master's Thesis, 1995