Micromachined Gyroscope with Integrated Electronics

The functionality of traditional electromechanical systems can be fulfilled by micromachined sensors with intern electronics while offering several orders of magnitude size and cost reduction. This work presents a micromachined two input axis angular rate sensor with integrated CMOS pickoff electronics. The nonlinear dynamics of the angular rate sensor are derived allowing the design to be optimized. Nonlinear feedback theory is used to provide an estimate of the applied exogenous input rate and full state preview feedback control. Constraints on the minimum detectable signal are derived.