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Large Displacement Electrostatic Microactuators With Polysilicon Flexure Suspensions |
Reid Alyn Brennen; Albert P. Pisano; Roger T. Howe; Homayoon Kazerooni |
1993 |
Ph.D. Dissertation |
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Controlled Structure Release for Silicon Surface Micromachining |
David Monk; David S. Soane; Roger T. Howe; David B. Graves |
1993 |
Ph.D. Dissertation |
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High-Senstivity Micromechanical Electrostatic Voltmeter |
David Loconto; Richard S. Muller; Roger T. Howe |
1992 |
Master's Thesis |
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A Surface Micromachined Accelerometer with Integrated CMOS Detection Circuitry |
Weijie Yun; Roger T. Howe |
1992 |
Ph.D. Dissertation |
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Hinged Polysilicon Structures with Integrated CMOS Thin Film Transistors |
Kristofer S.J. Pister; Roger T. Howe |
1992 |
Ph.D. Dissertation |
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A Curved Teeth Flexible Comb Drive for Electrostatic Microgrippers |
Ken Chow |
1992 |
Master's Thesis |
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Impact Actuation of Polysilicon Micromechanical Structures |
Abraham Lee; Albert P. Pisano; Roger T. Howe |
1992 |
Ph.D. Dissertation |
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Fabrication of Exposed Gate Field Effect Transistors for Sensor Applications |
Albert William Flounders; Dennis W. Hess |
1992 |
Ph.D. Dissertation |
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Applications of Ultrasonic Lamb Waves |
Stuart Wenzel; Richard M. White |
1992 |
Ph.D. Dissertation |
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The Optimal Kinematic Synthesis of Planar, Full Cycle, Constant-Velocity, Straight-Line Mechanisms |
Peter Hall Hodges; Albert P. Pisano |
1991 |
Ph.D. Dissertation |
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Silicon Electromechanical Microgrippers: Design, Fabrication, and Testing |
Chang-Jin Kim; Albert P. Pisano; Richard S. Muller |
1991 |
Ph.D. Dissertation |
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Microstructure Micropackaging |
Kristen M. McNair; Roger T. Howe; Richard M. White |
1991 |
Master's Thesis |
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Fluid-Actuated Micromachined Rotors and Gears |
Leslie A. Field; Richard M. White |
1991 |
Ph.D. Dissertation |
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Growth Stresses in Undoped LPCVD Polycrystalline Silicon Films |
Peter Krulevitch |
1991 |
Master's Thesis |
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The Motion of a Pointer Tip Driven by Two Linked Electrostatic Comb Drives |
Ronald Fox |
1991 |
Master's Thesis |
|
Miniature Gaseous Light Sources |
Hsi-Jen Yeh; Richard S. Muller; Roger T. Howe |
1991 |
Master's Thesis |
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Electromechanical Characterization of Microresonators for Circuit Applications |
Clark T.-C. Nguyen; Roger T. Howe |
1991 |
Master's Thesis |
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Micromechanical Electrostatic Voltmeter |
Charles Heng-Yuan Hsu; Richard S. Muller; Roger T. Howe |
1991 |
Master's Thesis |
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Design, Fabrication, and Optimization of Micromechanical Flexures |
Young-Ho Cho; Albert P. Pisano; Roger T. Howe |
1990 |
Ph.D. Dissertation |
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Thermal Applications of Microbridges |
Carlos Mastrangelo; Richard S. Muller |
1990 |
Ph.D. Dissertation |
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Integrated Microphone with CMOS Circuits on a Single Chip |
Eun Sok Kim; Richard S. Muller |
1990 |
Ph.D. Dissertation |
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Electrostatic Comb Drive for Resonant Sensor and Actuator Applications |
William C.-K. Tang; Roger T. Howe |
1990 |
Master's Thesis |
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Polysilicon Microstructures to Characterize State Friction |
Martin Lim; Roger T. Howe; Roberto Horowitz |
1990 |
Master's Thesis |
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Integrated Micromachinery -- Moving Structures on Silicon Chips |
Long-Sheng Fan; Richard S. Muller |
1990 |
Ph.D. Dissertation |
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Formation, Properties, and Applications of Porous Silicon |
Rolfe Anderson; Richard S. Muller |
1990 |
Ph.D. Dissertation |
