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Title Author Year Publication type
Silicon Electromechanical Microgrippers: Design, Fabrication, and Testing Chang-Jin Kim; Albert P. Pisano; Richard S. Muller 1991 Ph.D. Dissertation
Microstructure Micropackaging Kristen M. McNair; Roger T. Howe; Richard M. White 1991 Master's Thesis
Growth Stresses in Undoped LPCVD Polycrystalline Silicon Films Peter Krulevitch 1991 Master's Thesis
The Motion of a Pointer Tip Driven by Two Linked Electrostatic Comb Drives Ronald Fox 1991 Master's Thesis
Electromechanical Characterization of Microresonators for Circuit Applications Clark T.-C. Nguyen; Roger T. Howe 1991 Master's Thesis
Miniature Gaseous Light Sources Hsi-Jen Yeh; Richard S. Muller; Roger T. Howe 1991 Master's Thesis
Micromechanical Electrostatic Voltmeter Charles Heng-Yuan Hsu; Richard S. Muller; Roger T. Howe 1991 Master's Thesis
Design, Fabrication, and Optimization of Micromechanical Flexures Young-Ho Cho; Albert P. Pisano; Roger T. Howe 1990 Ph.D. Dissertation
Thermal Applications of Microbridges Carlos Mastrangelo; Richard S. Muller 1990 Ph.D. Dissertation
Integrated Microphone with CMOS Circuits on a Single Chip Eun Sok Kim; Richard S. Muller 1990 Ph.D. Dissertation
Electrostatic Comb Drive for Resonant Sensor and Actuator Applications William C.-K. Tang; Roger T. Howe 1990 Master's Thesis
Polysilicon Microstructures to Characterize State Friction Martin Lim; Roger T. Howe; Roberto Horowitz 1990 Master's Thesis
Integrated Micromachinery -- Moving Structures on Silicon Chips Long-Sheng Fan; Richard S. Muller 1990 Ph.D. Dissertation
Formation, Properties, and Applications of Porous Silicon Rolfe Anderson; Richard S. Muller 1990 Ph.D. Dissertation
IC-Processed Polysilicon Micromechanics: Technology, Material, and Devices Yu-Chong Tai; Richard S. Muller; Roger T. Howe 1989 Ph.D. Dissertation
Analysis and Characterization of the Vertical Carrier Domain Magnetometer Bret S. Burns; Richard S. Muller; Roger T. Howe 1989 Master's Thesis
Low Temperature Silicon-Silicon Bonding with Oxides Leslie A. Field; Richard S. Muller 1988 Master's Thesis
Reactive Ion Etching of Zinc Oxide and Indium-Tin-Oxide Eric Minami; Richard M. White; Roger T. Howe 1988 Master's Thesis
A Tactile Sensor Utilizing Light Coupling Between Optical Fibers Vadim Konradi 1987 Master's Thesis
Design, Theory, and Applications of Integrable Carrier-Domain Magnetometers Juan Goicolea; Richard S. Muller 1986 Ph.D. Dissertation
Pyroelectric ZnO Integrated Sensors Dennis L. Polla; Richard S. Muller; Richard M. White 1985 Master's Thesis
Integrated Silicon Electromechanical Vapor Sensor Roger T. Howe; Richard S. Muller; Richard M. White 1984 Ph.D. Dissertation
Integrated-Circuit-Compatible Electret and Condenser Ultrasonic Transducers Jonathan Bernstein; Richard M. White 1983 Ph.D. Dissertation

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