Design, Fabrication, Position Sensing, and Control of Electrostatic, Surface-Micromachined Polysilicon Microactuators |
Patrick Ching-Pak Cheung; Roberto Horowitz; Roger T. Howe; Albert P. Pisano |
1995 |
Ph.D. Dissertation |
The Damping Mechanism in Single-Ended Tuning Fork Resonant Structures |
Gonnan K. Leung; Roger T. Howe |
1995 |
Master's Thesis |
A Micro-Electro-Mechanical Systems (MEMS) Device to Measure the Fracture Strain of Polycrystalline Silicon |
Peter Truxtun Jones; Roger T. Howe |
1995 |
Master's Thesis |
Micromechanical Signal Processors |
Clark T.-C. Nguyen; Roger T. Howe |
1994 |
Ph.D. Dissertation |
Design and Implementation of Sigma-Delta Force-Balance Microaccelerometers |
Crist Lu; Bernhard E. Boser; Roger T. Howe |
1994 |
Master's Thesis |
Simulation of Microelectromechanical Systems |
Gary Fedder; Roger T. Howe |
1994 |
Ph.D. Dissertation |
Magnetic Microactuators with Polysilicon Flexures |
Jack William Judy; Richard S. Muller; Seth Sanders |
1994 |
Master's Thesis |
A Silicon-Based Microsensor to Measure Airborne Contaminants |
Bharat M. Shah; Richard M. White; Albert P. Pisano |
1994 |
Master's Thesis |
SPICE Analysis of a Micro Gyro and Mixed Analog-Digital Sensor Interface Circuit |
Amit Burstein; Chand R. Viswanathan; Kristofer S.J. Pister; William H. Kaiser |
1994 |
Master's Thesis |
Design and Analysis of Closed-loop Controlled Parallel-Plate Electrostatic MicroGrippers |
Patrick Breckow Chu; Kristofer S.J. Pister |
1994 |
Master's Thesis |
Micromachined Piezoelectric Microphones |
Robert P. Ried; Richard S. Muller |
1994 |
Ph.D. Dissertation |
Micromechanisms Using Sidewall Beams |
Michael Judy; Roger T. Howe |
1994 |
Ph.D. Dissertation |
Micromechanical Investigations of Silicon and Ni-Ti-Cu Thin Films |
Peter Krulevitch; George C. Johnson; Roger T. Howe; Kyriakos Kornvopoulos |
1994 |
Ph.D. Dissertation |
Gel-coated FPW Biosensors |
Amy Wang; Richard M. White |
1993 |
Master's Thesis |
Biochemical Microflow System / Microfabricated Optical Chopper |
Michael T. Ching; Richard M. White; Albert P. Pisano |
1993 |
Master's Thesis |
Modulated Infrared Source |
Peter Yung-Sen Chen; Richard S. Muller; Roger T. Howe |
1993 |
Master's Thesis |
Piezoresistive Sensing in Micromechanical Resonators |
Yorgen H. Anderson; Richard S. Muller; Richard M. White |
1993 |
Master's Thesis |
Selective Encapsulations of MEMS: Micro Channels, Needles, Resonators and Electromechanical Filters |
Liwei Lin; Albert P. Pisano; Roger T. Howe; Van P. Carey |
1993 |
Ph.D. Dissertation |
Large Displacement Electrostatic Microactuators With Polysilicon Flexure Suspensions |
Reid Alyn Brennen; Albert P. Pisano; Roger T. Howe; Homayoon Kazerooni |
1993 |
Ph.D. Dissertation |
Controlled Structure Release for Silicon Surface Micromachining |
David Monk; David S. Soane; Roger T. Howe; David B. Graves |
1993 |
Ph.D. Dissertation |
High-Senstivity Micromechanical Electrostatic Voltmeter |
David Loconto; Richard S. Muller; Roger T. Howe |
1992 |
Master's Thesis |
A Surface Micromachined Accelerometer with Integrated CMOS Detection Circuitry |
Weijie Yun; Roger T. Howe |
1992 |
Ph.D. Dissertation |
Hinged Polysilicon Structures with Integrated CMOS Thin Film Transistors |
Kristofer S.J. Pister; Roger T. Howe |
1992 |
Ph.D. Dissertation |
Impact Actuation of Polysilicon Micromechanical Structures |
Abraham Lee; Albert P. Pisano; Roger T. Howe |
1992 |
Ph.D. Dissertation |
Fabrication of Exposed Gate Field Effect Transistors for Sensor Applications |
Albert William Flounders; Dennis W. Hess |
1992 |
Ph.D. Dissertation |