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Design, Fabrication, Position Sensing, and Control of Electrostatic, Surface-Micromachined Polysilicon Microactuators |
Patrick Ching-Pak Cheung; Roberto Horowitz; Roger T. Howe; Albert P. Pisano |
1995 |
Ph.D. Dissertation |
|
The Damping Mechanism in Single-Ended Tuning Fork Resonant Structures |
Gonnan K. Leung; Roger T. Howe |
1995 |
Master's Thesis |
|
A Micro-Electro-Mechanical Systems (MEMS) Device to Measure the Fracture Strain of Polycrystalline Silicon |
Peter Truxtun Jones; Roger T. Howe |
1995 |
Master's Thesis |
|
Xenon Difluoride Etching of Silicon for MEMS |
Floy I-Jung Chang; Kristofer S.J. Pister |
1995 |
Master's Thesis |
|
CMOS Based Chemical Sensors |
Dharmesh Bhalchandra Jani; Kristofer S.J. Pister |
1995 |
Master's Thesis |
|
Micromachined Piezoelectric Cantilever Transducers |
Seung Lee; Richard M. White; George C. Johnson; Fai Ma; David S. Soane |
1995 |
Ph.D. Dissertation |
|
Thermally-Driven Angular Rate Sensors in Standard CMOS |
Michael Dean Pottenger |
1995 |
Master's Thesis |
|
A Micromachined Vibrating Ring Gyroscope |
Michael William Putty; Khalil Najafi; Kensall D. Wise; Stella W. Pang; Noel Perkins |
1995 |
Ph.D. Dissertation |
|
Surface Micromachined Resonant Force Transducers |
Trey Roessig; Albert P. Pisano; George C. Johnson; Lisa Pruitt |
1995 |
Master's Thesis |
|
Development of a Free-Space Optical Switch for Fiber Communications Based on Actuated, Silicon Surface-Micromachined Mirrors |
Alois Friedberger; Richard S. Muller |
1996 |
Master's Thesis |
|
MEMS Design via Automated Synthesis, Extraction, and Simulation |
Hee Jung Lee; Kristofer S.J. Pister |
1996 |
Master's Thesis |
|
Permeable Polysilicon Etch-Access Windows for Microshell Fabrication |
Kyle Lebouitz |
1996 |
Master's Thesis |
|
HexSil Micro Disk Drive Arm |
Roel Dieron; Albert P. Pisano; Roberto Horowitz |
1996 |
Master's Thesis |
|
An Investigation of MEMS Anchor Design for Optimal Stiffness and Damping |
Daniel Sherman; Albert P. Pisano; George C. Johnson; Panayiotis Papadopoulos |
1996 |
Master's Thesis |
|
Design Issues For Differential Z-Axis Accelerometers |
Monico Ortiz; Bernhard E. Boser; Roger T. Howe |
1996 |
Master's Thesis |
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Micromachined Photonic Devices and Systems on Silicon |
Michael Daneman; Kam Y. Lau; Richard S. Muller; Albert P. Pisano |
1996 |
Ph.D. Dissertation |
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Batch-Fabricated Ferromagnetic Microactuators with Silicon Flexures |
Jack William Judy; Richard S. Muller; Richard M. White; Timothy D. Sands |
1996 |
Ph.D. Dissertation |
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A High-Voltage Charge Pump in Bulk CMOS |
Eugene Lau Cheung; Bernhard Boser; Albert P. Pisano |
1996 |
Master's Thesis |
|
Surface Treatments for Adhesion Reduction in Polysilicon Micromechanical Devices |
Michael Robert Houston; Roya Maboudian; Roger T. Howe; David B. Graves |
1996 |
Ph.D. Dissertation |
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Micromachined Silicon Ultrasonic Longitudinal Mode Actuators: Theory and Applications to Surgery, Pumping, and Atomization |
Amit Lal; Richard M. White |
1996 |
Ph.D. Dissertation |
|
Jewel Bearings for Micro Disk Drives |
Kelly Yang; Albert P. Pisano |
1996 |
Master's Thesis |
|
Micromachined Hot-Filament Vacuum Devices |
Kirt R. Williams; Richard S. Muller |
1997 |
Ph.D. Dissertation |
|
Micro Accelerometer Design with Digital Feedback Control |
Mark Lemkin; David M. Auslander; Bernhard E. Boser; Albert P. Pisano |
1997 |
Ph.D. Dissertation |
|
Micromachined Gyroscope with Integrated Electronics |
Per Ljung; Albert P. Pisano; Roger T. Howe; Andrew K. Packard |
1997 |
Ph.D. Dissertation |
|
Parametric Design and Characterization of Linear Microvibromotors |
Roger Hipwell; Albert P. Pisano; Richard S. Muller; Oliver M. O'Reilly |
1997 |
Master's Thesis |
|
Design and Control of Micro-actuators for High Density Disk Drives |
Sanjay K. Aggarwal; Roberto Horowitz |
1997 |
Master's Thesis |
|
Thin Film Zinc Oxide Microsensors and Microactuators |
Don DeVoe; Albert P. Pisano; Roger T. Howe; Tim Sands |
1997 |
Ph.D. Dissertation |
|
Micromachined Dual Input Axis Rate Gyroscope |
Thor Juneau; Albert P. Pisano; Roger T. Howe; Roberto Horowitz |
1997 |
Ph.D. Dissertation |
|
Micromachined Vibratory Rate Gyroscopes |
William A. Clark; Roger T. Howe |
1997 |
Ph.D. Dissertation |
|
A Micromachined Acoustic Immunosensor for the Detection of Breast Cancer Antigens |
Amy Wang; Richard M. White |
1997 |
Ph.D. Dissertation |
|
Micromechanical Power Conversion |
J. Mark Noworolski; Seth Sanders; Roger T. Howe; Albert P. Pisano |
1998 |
Ph.D. Dissertation |
|
Micro-Optical Devices for Communications and Beyond |
Meng-Hsiung Kiang; Kam Y. Lau; Richard S. Muller; Raymond Y. Chiao |
1998 |
Ph.D. Dissertation |
|
Adaptive Servo Schemes using Micromachined Accelerometers for Increased Disturbance Rejection for Magnetic Hard Disk Drives |
Satinderpall Pannu; Roberto Horowitz; Albert P. Pisano; Roger T. Howe |
1998 |
Ph.D. Dissertation |
|
Integrated MEMS Tuning Fork Oscillators for Sensor Applications |
Trey Roessig; Albert P. Pisano; Kameshwar Poolla; Roger T. Howe |
1998 |
Ph.D. Dissertation |
|
Microfabricated Silicon High Aspect Ratio Flexures for In-Plane Motion |
Christopher Guild Keller; Roger T. Howe; John W. Morris, Jr.; Kristofer S.J. Pister; Timothy D. Sands |
1998 |
Ph.D. Dissertation |
|
Microfabricated Electrostatic Actuators for Magnetic Disk Drives |
David A. Horsley; Albert P. Pisano; Roberto Horowitz; Roger T. Howe |
1998 |
Ph.D. Dissertation |
|
A Magnetically Actuated Scanning Microplatform for Intravascular Ultrasound Imaging |
Carl Chang; Richard S. Muller |
1998 |
Master's Thesis |
|
The Development of Lead Zirconate Titanate Thin Films for Piezoelectric Microactuators |
Annabel Susan Nickles; Eugene E. Haller; Richard M. White; Timothy D. Sands |
1998 |
Ph.D. Dissertation |
|
Position Sensing for Electrostatic Micropositioners |
Naiyavudhi Wongkomet; Bernhard E. Boser; Paul R. Gray; Albert A. Pisano |
1998 |
Ph.D. Dissertation |
|
MEMS Barcode Reader |
James Teng; Richard S. Muller; Kam Y. Lau |
1998 |
Master's Thesis |
|
Assembly Techniques for Microelectromechanical Systems |
Michael B. Cohn; Roger T. Howe |
1998 |
Ph.D. Dissertation |
|
MEMS Microshells for Microneedles, Microscale Fluid Visualization, and Vacuum Packaging of Microdevices |
Kyle Lebouitz; Albert P. Pisano; Roger T. Howe; Dorian Liepmann |
1998 |
Ph.D. Dissertation |
|
An SOI Based, Fully Integrated Fabrication Process for High-Aspect-Ratio Microelectromechanical Systems |
Timothy Brosnihan; Albert P. Pisano; Roger T. Howe; David Dornfeld |
1998 |
Ph.D. Dissertation |
|
MicroElectroMechanical Devices and Fabrication Technologies for Radio-Frequency Analog Signal Processing |
Darrin Young; Bernhard E. Boser; Robert G. Meyer; Albert P. Pisano |
1999 |
Ph.D. Dissertation |
|
Planar Microfluidics: Toward Large Scale Integration of Channels, Pumps, Valves, and Fluid Mixers in Microelectromechanical Systems (MEMS) |
John Evans; Dorian Liepmann; Albert P. Pisano; Roger T. Howe |
1999 |
Ph.D. Dissertation |
|
Design and Modeling of a Dual Mass SOI-MEMS Gyroscope |
Ashwin Seshia; Roger T. Howe; Kristofer S.J. Pister |
1999 |
Master's Thesis |
|
Integrated Mesoscopic Fluidic Interconnects for Micro-Machined Fluidic Devices |
Jennifer Ann Scalf; Albert P. Pisano; Dorian Liepmann |
1999 |
Master's Thesis |
|
Polysilicon Micromolding of Closed-Flow Passages for the Fabrication of Multifunctional Microneedles |
Neil Hamilton Talbot; Albert P. Pisano; Dorian Liepmann; Richard S. Muller |
1999 |
Master's Thesis |
|
Algorithms for Distributed Sensor Networks |
James D. McLurkin; Kristofer S. J. Pister |
1999 |
Master's Thesis |
|
Microrelay Design, Performance, and Systems |
Ezekiel Kruglick; Kristofer S.J. Pister; Roger T. Howe; Richard M. White; Dorian Liepmann |
1999 |
Ph.D. Dissertation |
