Roya Maboudian (Advisor)

Research Advised by Professor Roya Maboudian

Maboudian Group:  List of Projects | List of Researchers

RM7/RTH: Dedicated SiC MEMS LPCVD Reactor for Access through the DARPA MEMS Exchange Program

Christopher S. Roper
2007

This project seeks to make Silicon Carbide thin films available to MEMS researchers and designers. A process developed in the Maboudian Lab at UC Berkeley which currently accommodates 2-inch wafers will be scaled up to accommodate 4- and 6-inch wafers. High quality poly-crystalline 3C-SiC films deposited at reasonable growth rates, with controlled residual stress, controlled strain gradient, controlled resistivity, and high uniformity will be sought. Once films with high overall quality and repeatability are grown the process will be released to the MEMS community.

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BPN582: HEaTS: Structurally Multifunctional Actuation and Readout Techniques for MEMS (SMART MEMS)

Kamran Shavezipur
Jamie Young
2011

The goal of this project is to develop multifunctional sensors for harsh environment where using one device different physical parameters can be measured. The main focus for the current phase is on a multifunctional temperature-pressure sensor that simultaneously measures both pressure and temperature using a smart structure and capacitive readout.

Project end date: 01/26/12

BPN763: Surface Acoustic Wave-Based Sensors for Harsh Environment Applications

Shuo Chen
2014

Sensing in harsh environment, especially high temperature environment, is drawing more attention, with potential applications in energy sector. The motivations are that enhanced (pressure, temperature, chemical) sensing will allow more efficient operation, enabling condition- based monitoring and reducing unwanted emission. State-of-the-art sensing technology remains limited, either not capable of long-term online monitoring under high temperature due to materials failure or, occupying too much space. We propose to adapt MEMS fabrication process and concepts to our proposed research...

BPN424: Silicon Carbide Nanomaterials for Harsh Environment Applications

Lunet E. Luna
2015

Silicon Carbide (SiC) is a material of interest to fabricate sensors and actuators able to operate in harsh environments. Particularly, its mechanical and electrical stability and its chemical inertness make SiC well suited for designing devices capable of operation in high temperature and corrosive environments. Harsh-environment stable metallization remains one of the key challenges with SiC technology. We are developing novel metallization schemes, utilizing solid-state graphitization, to improve the long-term reliability of Pt/Ti/poly-SiC contacts in high temperature environments...

BPN783: Low-Power Conductometric Soot Sensor with Fast Self-Regeneration

Ameya Rao
2015

We are designing a conductometric soot sensor that measures the change in conductance resulting from soot deposition onto the sensor. Although previous work has been done on conductometric soot sensing, current sensors are power intensive (5-30 W) and slow (60-170 s between sensing cycles) due to their large size, ineffective thermal insulation, and the high currents required for soot combustion (when self-regenerating). We propose to use MEMS fabrication methods to develop a miniaturized conductometric soot sensor with a built-in polysilicon microheater for self-regeneration, whose...

BPN797: Synthesis and Friction Characteristics of Gecko-Inspired Adhesives

Hai Liu
JuKyung Choi
Gina Zaghi
2016

Geckos have a remarkable ability to stick to and climb almost any type of surface using micro- and nanoscale foot- hairs, which allow conformal contact against any counter-surface and thus, maximize the interfacial interaction. With the goal of mimicking the high adhesion and friction capability of geckos, we have fabricated ordered polymeric nano-fiber arrays of various soft and hard polymers, including low-density polyethylene and cyclic olefin polymers. In order to provide a useful reference for optimum high performance conditions, the effects of fiber geometry (diameter and...

BPN819: Hybrid Porous Nanowire Arrays for High Energy Supercapacitor

Sinem Ortaboy
2016

Recently, silicon-based supercapacitors have received considerable attention for application in mobile and remote sensing platforms due to their unique properties such as high surface area, low cost, long lifetimes, and excellent charge–discharge capability. These promising energy storage devices store more energy than conventional dielectric capacitors and deliver higher power with longer cycle life than available battery technologies. Recent studies in the field of supercapacitors have focused on the realization of hybrid materials to further improve the energy density of...

BPN762: Microheater-Based Platform for Low Power Combustible Gas Sensing

Anna Harley-Trochimczyk
2016

Accurate detection of flammable gases is essential for safe operation of many industrial processes. Installing networks of combustible gas monitors in industrial settings can allow for rapid leak detection and increased safety and environmental protection. However, existing combustible gas monitors are not suitable for use in wireless sensor networks due to the high power consumption. We have developed an ultra-low power combustible gas sensor with competitive sensitivity and lifetime characteristics that will enable ubiquitous wireless monitoring of combustible gases in industrial...

BPN786: NanoPlasmonics for Sensing and Energy

Arthur O. Montazeri
2016

Controlling and concentrating infrared radiation has the potential to significantly impact infrared sensors, thermal imaging devices, as well as heat conversion systems. As most molecules have vibrational modes in the infrared range, they reradiate a great portion of the incident radiation instead of efficiently transmitting it. As a promising alternative, plasmonic gratings not only offer low-loss transmission of infrared radiation, but also compress the long infrared wavelengths. This localization effect greatly improves the sensing resolution and offers high-intensity fields at...

BPN827: Metal Oxide-decorated Silicon Carbide Nanowires Electrode for The Applications on Electrochemical Energy Storage

Chuan-Pei Lee
Steven DelaCruz
2016

Since the discovery of electricity, we are looking for promising methods to store that energy for use on demand. In the energy storage industry, electrochemical water splitting is a well-established technology to convert electricity into chemical energy, addressing the issues of effective storage and transport. On the other hand, electrochemical capacitors, namely supercapacitors, have also attracted much attention for electrical energy storage because of their feature of both high power density and energy density. In this work, we are developing processes for the synthesis of metal...