Sensing in harsh environment, especially high temperature environment, is drawing more attention, with potential applications in energy sector. The motivations are that enhanced (pressure, temperature, chemical) sensing will allow more efficient operation, enabling condition- based monitoring and reducing unwanted emission. State-of-the-art sensing technology remains limited, either not capable of long-term online monitoring under high temperature due to materials failure or, occupying too much space. We propose to adapt MEMS fabrication process and concepts to our proposed research...