BPN582: HEaTS: Structurally Multifunctional Actuation and Readout Techniques for MEMS (SMART MEMS)


The goal of this project is to develop multifunctional sensors for harsh environment where using one device different physical parameters can be measured. The main focus for the current phase is on a multifunctional temperature-pressure sensor that simultaneously measures both pressure and temperature using a smart structure and capacitive readout.

Project end date: 01/26/12

Kamran Shavezipur
Jamie Young
Publication date: 
August 15, 2011
Publication type: 
BSAC Project Materials (Final/Archive)
PREPUBLICATION DATA - ©University of California 2011

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