RM6: Adhesion in MEMS

Abstract: 

The ultimate goal of this project is to further develop previous work that involved adhesion studies in MEMS devices.

Project end date: 08/18/04

Author: 
Robert Ashurst
Elizabeth E. Parker
Publication date: 
February 20, 2004
Publication type: 
BSAC Project Materials (Final/Archive)
Citation: 
PREPUBLICATION DATA - ©University of California 2004

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