We have developed fabrication processes to create top down nanowire coupled resonators. The critical dimensions were defined using a combination of iline lithography, photoresist ashing techniques and focused ion beam trimming. Nanowires are used as mechanical elements to demonstrate low velocity and maximum velocity coupling. We have also demonstrated an bottom up/ top down integrated fabrication process. Features for the top down segment of the fabrication process are aligned to (111) flat on a (110) SOI wafer. A gold based galvanic displacement method selectively deposits catalyst particles on exposed silicon sidewalls. Si VLS nanowires are then grown on the top down structures. The structures are then released with the Si nanowires acting as mechanical springs suspending the devices above the handle wafer.
Project end date: 07/30/07