Liwei Lin (Advisor)

Research Advised by Professor Liwei Lin

Lin Group:  List of Projects | List of Researchers

LWL14: Selective Induction Heating for MEMS Packaging

Andrew Cao
2004

Develop a wafer bonding and hermetic sealing technology based on induction heating for MEMS and IC post packaging.

Project end date: 08/19/04

LWL28: Bi-directional Electrothermal Electromagnetic Actuators and Relays

Lufeng Che
2005

Micro relays powered by bi-directional electrothermal electromagnetic actuator has been designed, built and tested. Relays built using these actuators can have single pole double throw (SPDT) configuration. Bi-directional actuators can be used to make bi-stable relays, which only require power consumption during the switching operations. The relays built can switch both high current and high voltages. The off state resistance is over 100 Megaohm with a breakdown voltage exceeding 200V. The on state resistance is around 0.3 ohm can carry several amps before failure. The performance of...

LWL17: Micromachined Photosynthetic Fuel Cells

Kien-Bang Lam
2005

The project aims to develop micromachined biological photosynthetic fuel cells (uPFC) for two classes of devices: (1) micro-scale mobile sensors and micro communication devices and (2) nano-scale molecular motors such as ATP synthase and myosin. For the first class of devices, the uPFCs are competing technologies to other micro power sources such as micro batteries, micro engines, and thin-film solar cells. However, for the second class, the uPFC is a pioneering effort to engineer power sources for future molecular and biomimetic devices.

Project end date: 08/26/...

LWL29: Nano-Getters for MEMS Applications

Daoheng Sun
Dane Christensen
2005

High vacuum inside a micro-cavity is hoped to be obtained and maintained for lifetime of a MEMS. This project will supply design rules of getter dimensions in MEMS packaging by exploring the relationships of the residual gas pressure and its variety in a cavity with (1) the different getter materials, such as Ti, Zr, V, and their mixture, (2) the surface area, thickness, and amount of the getter deposited respectively. Multi-times activating the getter by means of localized heating to improve the efficiency of it. Develop nano-getter with high porosity and large surface area. Design...

LWL18: Integration of NEMS and MEMS by Localized Growth of Nanowires

Ongi Englander
2005

Integrated manufacturing of nano-to-micro systems is critical for the practical applications of nanotechnology. This research project aims (1) to develop and characterize an integrated manufacturing process to connect nanostructures with micro scale systems and (2) to utilize the integrated structure for practical sensing applications.

Project end date: 08/31/05

BPN331: Plastically Self-Alligned Micromirrors

TeHsi Lee
2006

This project aims to use the plastic deformation of silicon as the key process to make Angular Vertical Comb-drive (AVC) actuators using a simple 3-mask process and yet providing versatility for the various applications.

Project end date: 02/14/06

BPN309: SAM for MEMS Packaging/Fuel Cell Applications

SangHoon LEE
2006

In this project, Self-Assembled Monolayer (SAM) is investigated for possible MEMS packaging and fuel cell applications.

Project end date: 07/31/06

LWL16: On-Chip DNA Transformation by Local Heat Shock and Cell Cryopreservation

Sha Li
2007

To develop DNA transformation by local heat shock and on-chip cryopreservation of cells with MEMS technology.

Project end date: 02/02/07

BPN341: Plastic Energy Harvester

YiinKuen Fuh
2006

This project aims to develop a plastic energy harvesting system by utilizing piezoelectric ceramics to scavenge energy from natural motions for self-powered sensor applications. Plastic molding processes will be employed to achieve a low cost and high reliability/repeatability manufacturing process. Several piezoelectric configurations such as uni-morphs(THUNDER?), bimorphs as well as multilayers will be explored with particular focus on power maximization and highly-reliable structures in order to survive harsh environment. The ultimate goal will be the development of low-cost,...

BPN353: Integration of MEMS switches and RF passive components

Tommy Fujii
Dan McCormick
2006

In order to develop advanced multi-functional RF devices for future applications, it is expected that significant advancements must be made to existing technologies or a new technology must be developed. One such enabling technology is the ability to integrate all passive elements and switches monolithically. This technology would represent a new class of RF design and manufacturing capabilities. In order to develop this technology and make it a reality, we are investigating the feasibility of a fabrication process integrating high quality MEMS switches, spiral inductors and MIS...