Abstract:
The objective of this project is to develop vertically driven comb actuators with self-aligned comb sets using a novel yet simple fabrication process and apply it to optical MEMS devices.
Project end date: 08/18/04
Publication date:
February 8, 2004
Publication type:
BSAC Project Materials (Final/Archive)
Citation:
PREPUBLICATION DATA - ©University of California 2004