LWL21: Microfabricated Torsional Actuator by Self-Aligned Plastic Deformation


The objective of this project is to develop vertically driven comb actuators with self-aligned comb sets using a novel yet simple fabrication process and apply it to optical MEMS devices.

Project end date: 08/18/04

Publication date: 
February 8, 2004
Publication type: 
BSAC Project Materials (Final/Archive)
PREPUBLICATION DATA - ©University of California 2004

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