Abstract:
This research aims to develop vertically supported microactuators and optical systems on a chip for MEMS and MOEMS applications that require motions of surface-micromachined microstructures or microoptical components. The fabrication process of microactuators is compatable with common MEMS fabrication process and IC manufacturing process, such as the CMOS process.
Project end date: 01/24/04
Publication date:
August 20, 2003
Publication type:
BSAC Project Materials (Final/Archive)
Citation:
PREPUBLICATION DATA - ©University of California 2003