LWL23: Vertically Supported Microactuators


This research aims to develop vertically supported microactuators and optical systems on a chip for MEMS and MOEMS applications that require motions of surface-micromachined microstructures or microoptical components. The fabrication process of microactuators is compatable with common MEMS fabrication process and IC manufacturing process, such as the CMOS process.

Project end date: 01/24/04

Ki Bang Lee
Publication date: 
August 20, 2003
Publication type: 
BSAC Project Materials (Final/Archive)
PREPUBLICATION DATA - ©University of California 2003

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