BPN331: Plastically Self-Alligned Micromirrors


This project aims to use the plastic deformation of silicon as the key process to make Angular Vertical Comb-drive (AVC) actuators using a simple 3-mask process and yet providing versatility for the various applications.

Project end date: 02/14/06

TeHsi Lee
Publication date: 
February 1, 2006
Publication type: 
BSAC Project Materials (Final/Archive)
PREPUBLICATION DATA - ©University of California 2006

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