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Title Author Year Publication type
Xenon Difluoride Etching of Silicon for MEMS Floy I-Jung Chang; Kristofer S.J. Pister 1995 Master's Thesis
Ultrasonic Microtransport Richard M. Moroney III; Richard M. White 1995 Ph.D. Dissertation
Design, Fabrication, Position Sensing, and Control of Electrostatic, Surface-Micromachined Polysilicon Microactuators Patrick Ching-Pak Cheung; Roberto Horowitz; Roger T. Howe; Albert P. Pisano 1995 Ph.D. Dissertation
The Damping Mechanism in Single-Ended Tuning Fork Resonant Structures Gonnan K. Leung; Roger T. Howe 1995 Master's Thesis
A Micro-Electro-Mechanical Systems (MEMS) Device to Measure the Fracture Strain of Polycrystalline Silicon Peter Truxtun Jones; Roger T. Howe 1995 Master's Thesis
Micromechanical Signal Processors Clark T.-C. Nguyen; Roger T. Howe 1994 Ph.D. Dissertation
Design and Implementation of Sigma-Delta Force-Balance Microaccelerometers Crist Lu; Bernhard E. Boser; Roger T. Howe 1994 Master's Thesis
Simulation of Microelectromechanical Systems Gary Fedder; Roger T. Howe 1994 Ph.D. Dissertation
A Silicon-Based Microsensor to Measure Airborne Contaminants Bharat M. Shah; Richard M. White; Albert P. Pisano 1994 Master's Thesis
Magnetic Microactuators with Polysilicon Flexures Jack William Judy; Richard S. Muller; Seth Sanders 1994 Master's Thesis
Design and Analysis of Closed-loop Controlled Parallel-Plate Electrostatic MicroGrippers Patrick Breckow Chu; Kristofer S.J. Pister 1994 Master's Thesis
Micromachined Piezoelectric Microphones Robert P. Ried; Richard S. Muller 1994 Ph.D. Dissertation
SPICE Analysis of a Micro Gyro and Mixed Analog-Digital Sensor Interface Circuit Amit Burstein; Chand R. Viswanathan; Kristofer S.J. Pister; William H. Kaiser 1994 Master's Thesis
Micromechanisms Using Sidewall Beams Michael Judy; Roger T. Howe 1994 Ph.D. Dissertation
Micromechanical Investigations of Silicon and Ni-Ti-Cu Thin Films Peter Krulevitch; George C. Johnson; Roger T. Howe; Kyriakos Kornvopoulos 1994 Ph.D. Dissertation
Biochemical Microflow System / Microfabricated Optical Chopper Michael T. Ching; Richard M. White; Albert P. Pisano 1993 Master's Thesis
Modulated Infrared Source Peter Yung-Sen Chen; Richard S. Muller; Roger T. Howe 1993 Master's Thesis
Piezoresistive Sensing in Micromechanical Resonators Yorgen H. Anderson; Richard S. Muller; Richard M. White 1993 Master's Thesis
Gel-coated FPW Biosensors Amy Wang; Richard M. White 1993 Master's Thesis
Selective Encapsulations of MEMS: Micro Channels, Needles, Resonators and Electromechanical Filters Liwei Lin; Albert P. Pisano; Roger T. Howe; Van P. Carey 1993 Ph.D. Dissertation