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Title Author Year Publication type
Micromachined Photonic Devices and Systems on Silicon Michael Daneman; Kam Y. Lau; Richard S. Muller; Albert P. Pisano 1996 Ph.D. Dissertation
Design Issues For Differential Z-Axis Accelerometers Monico Ortiz; Bernhard E. Boser; Roger T. Howe 1996 Master's Thesis
MEMS Design via Automated Synthesis, Extraction, and Simulation Hee Jung Lee; Kristofer S.J. Pister 1996 Master's Thesis
Permeable Polysilicon Etch-Access Windows for Microshell Fabrication Kyle Lebouitz 1996 Master's Thesis
HexSil Micro Disk Drive Arm Roel Dieron; Albert P. Pisano; Roberto Horowitz 1996 Master's Thesis
An Investigation of MEMS Anchor Design for Optimal Stiffness and Damping Daniel Sherman; Albert P. Pisano; George C. Johnson; Panayiotis Papadopoulos 1996 Master's Thesis
Development of a Free-Space Optical Switch for Fiber Communications Based on Actuated, Silicon Surface-Micromachined Mirrors Alois Friedberger; Richard S. Muller 1996 Master's Thesis
Micromachined Piezoelectric Cantilever Transducers Seung Lee; Richard M. White; George C. Johnson; Fai Ma; David S. Soane 1995 Ph.D. Dissertation
Thermally-Driven Angular Rate Sensors in Standard CMOS Michael Dean Pottenger 1995 Master's Thesis
A Micromachined Vibrating Ring Gyroscope Michael William Putty; Khalil Najafi; Kensall D. Wise; Stella W. Pang; Noel Perkins 1995 Ph.D. Dissertation
Surface Micromachined Resonant Force Transducers Trey Roessig; Albert P. Pisano; George C. Johnson; Lisa Pruitt 1995 Master's Thesis
CMOS Based Chemical Sensors Dharmesh Bhalchandra Jani; Kristofer S.J. Pister 1995 Master's Thesis
Xenon Difluoride Etching of Silicon for MEMS Floy I-Jung Chang; Kristofer S.J. Pister 1995 Master's Thesis
Ultrasonic Microtransport Richard M. Moroney III; Richard M. White 1995 Ph.D. Dissertation
Design, Fabrication, Position Sensing, and Control of Electrostatic, Surface-Micromachined Polysilicon Microactuators Patrick Ching-Pak Cheung; Roberto Horowitz; Roger T. Howe; Albert P. Pisano 1995 Ph.D. Dissertation
The Damping Mechanism in Single-Ended Tuning Fork Resonant Structures Gonnan K. Leung; Roger T. Howe 1995 Master's Thesis
A Micro-Electro-Mechanical Systems (MEMS) Device to Measure the Fracture Strain of Polycrystalline Silicon Peter Truxtun Jones; Roger T. Howe 1995 Master's Thesis
Micromechanical Signal Processors Clark T.-C. Nguyen; Roger T. Howe 1994 Ph.D. Dissertation
Design and Implementation of Sigma-Delta Force-Balance Microaccelerometers Crist Lu; Bernhard E. Boser; Roger T. Howe 1994 Master's Thesis
Simulation of Microelectromechanical Systems Gary Fedder; Roger T. Howe 1994 Ph.D. Dissertation