Publications

Title Author Yearsort descending Publication type
Design, Fabrication, Position Sensing, and Control of Electrostatic, Surface-Micromachined Polysilicon Microactuators Patrick Ching-Pak Cheung; Roberto Horowitz; Roger T. Howe; Albert P. Pisano 1995 Ph.D. Dissertation
The Damping Mechanism in Single-Ended Tuning Fork Resonant Structures Gonnan K. Leung; Roger T. Howe 1995 Master's Thesis
A Micro-Electro-Mechanical Systems (MEMS) Device to Measure the Fracture Strain of Polycrystalline Silicon Peter Truxtun Jones; Roger T. Howe 1995 Master's Thesis
Xenon Difluoride Etching of Silicon for MEMS Floy I-Jung Chang; Kristofer S.J. Pister 1995 Master's Thesis
CMOS Based Chemical Sensors Dharmesh Bhalchandra Jani; Kristofer S.J. Pister 1995 Master's Thesis
A Micromachined Vibrating Ring Gyroscope Michael William Putty; Khalil Najafi; Kensall D. Wise; Stella W. Pang; Noel Perkins 1995 Ph.D. Dissertation
Surface Micromachined Resonant Force Transducers Trey Roessig; Albert P. Pisano; George C. Johnson; Lisa Pruitt 1995 Master's Thesis
Micromachined Piezoelectric Cantilever Transducers Seung Lee; Richard M. White; George C. Johnson; Fai Ma; David S. Soane 1995 Ph.D. Dissertation
Thermally-Driven Angular Rate Sensors in Standard CMOS Michael Dean Pottenger 1995 Master's Thesis
Development of a Free-Space Optical Switch for Fiber Communications Based on Actuated, Silicon Surface-Micromachined Mirrors Alois Friedberger; Richard S. Muller 1996 Master's Thesis
MEMS Design via Automated Synthesis, Extraction, and Simulation Hee Jung Lee; Kristofer S.J. Pister 1996 Master's Thesis
Permeable Polysilicon Etch-Access Windows for Microshell Fabrication Kyle Lebouitz 1996 Master's Thesis
HexSil Micro Disk Drive Arm Roel Dieron; Albert P. Pisano; Roberto Horowitz 1996 Master's Thesis
An Investigation of MEMS Anchor Design for Optimal Stiffness and Damping Daniel Sherman; Albert P. Pisano; George C. Johnson; Panayiotis Papadopoulos 1996 Master's Thesis
Design Issues For Differential Z-Axis Accelerometers Monico Ortiz; Bernhard E. Boser; Roger T. Howe 1996 Master's Thesis
Micromachined Photonic Devices and Systems on Silicon Michael Daneman; Kam Y. Lau; Richard S. Muller; Albert P. Pisano 1996 Ph.D. Dissertation
A High-Voltage Charge Pump in Bulk CMOS Eugene Lau Cheung; Bernhard Boser; Albert P. Pisano 1996 Master's Thesis
Batch-Fabricated Ferromagnetic Microactuators with Silicon Flexures Jack William Judy; Richard S. Muller; Richard M. White; Timothy D. Sands 1996 Ph.D. Dissertation
Micromachined Silicon Ultrasonic Longitudinal Mode Actuators: Theory and Applications to Surgery, Pumping, and Atomization Amit Lal; Richard M. White 1996 Ph.D. Dissertation
Jewel Bearings for Micro Disk Drives Kelly Yang; Albert P. Pisano 1996 Master's Thesis
Surface Treatments for Adhesion Reduction in Polysilicon Micromechanical Devices Michael Robert Houston; Roya Maboudian; Roger T. Howe; David B. Graves 1996 Ph.D. Dissertation
Micromachined Hot-Filament Vacuum Devices Kirt R. Williams; Richard S. Muller 1997 Ph.D. Dissertation
Parametric Design and Characterization of Linear Microvibromotors Roger Hipwell; Albert P. Pisano; Richard S. Muller; Oliver M. O'Reilly 1997 Master's Thesis
Design and Control of Micro-actuators for High Density Disk Drives Sanjay K. Aggarwal; Roberto Horowitz 1997 Master's Thesis
Micro Accelerometer Design with Digital Feedback Control Mark Lemkin; David M. Auslander; Bernhard E. Boser; Albert P. Pisano 1997 Ph.D. Dissertation
Micromachined Gyroscope with Integrated Electronics Per Ljung; Albert P. Pisano; Roger T. Howe; Andrew K. Packard 1997 Ph.D. Dissertation
Thin Film Zinc Oxide Microsensors and Microactuators Don DeVoe; Albert P. Pisano; Roger T. Howe; Tim Sands 1997 Ph.D. Dissertation
Micromachined Vibratory Rate Gyroscopes William A. Clark; Roger T. Howe 1997 Ph.D. Dissertation
A Micromachined Acoustic Immunosensor for the Detection of Breast Cancer Antigens Amy Wang; Richard M. White 1997 Ph.D. Dissertation
Micromachined Dual Input Axis Rate Gyroscope Thor Juneau; Albert P. Pisano; Roger T. Howe; Roberto Horowitz 1997 Ph.D. Dissertation
Micromechanical Power Conversion J. Mark Noworolski; Seth Sanders; Roger T. Howe; Albert P. Pisano 1998 Ph.D. Dissertation
Micro-Optical Devices for Communications and Beyond Meng-Hsiung Kiang; Kam Y. Lau; Richard S. Muller; Raymond Y. Chiao 1998 Ph.D. Dissertation
Integrated MEMS Tuning Fork Oscillators for Sensor Applications Trey Roessig; Albert P. Pisano; Kameshwar Poolla; Roger T. Howe 1998 Ph.D. Dissertation
Microfabricated Silicon High Aspect Ratio Flexures for In-Plane Motion Christopher Guild Keller; Roger T. Howe; John W. Morris, Jr.; Kristofer S.J. Pister; Timothy D. Sands 1998 Ph.D. Dissertation
Microfabricated Electrostatic Actuators for Magnetic Disk Drives David A. Horsley; Albert P. Pisano; Roberto Horowitz; Roger T. Howe 1998 Ph.D. Dissertation
A Magnetically Actuated Scanning Microplatform for Intravascular Ultrasound Imaging Carl Chang; Richard S. Muller 1998 Master's Thesis
Adaptive Servo Schemes using Micromachined Accelerometers for Increased Disturbance Rejection for Magnetic Hard Disk Drives Satinderpall Pannu; Roberto Horowitz; Albert P. Pisano; Roger T. Howe 1998 Ph.D. Dissertation
The Development of Lead Zirconate Titanate Thin Films for Piezoelectric Microactuators Annabel Susan Nickles; Eugene E. Haller; Richard M. White; Timothy D. Sands 1998 Ph.D. Dissertation
Position Sensing for Electrostatic Micropositioners Naiyavudhi Wongkomet; Bernhard E. Boser; Paul R. Gray; Albert A. Pisano 1998 Ph.D. Dissertation
MEMS Barcode Reader James Teng; Richard S. Muller; Kam Y. Lau 1998 Master's Thesis
Assembly Techniques for Microelectromechanical Systems Michael B. Cohn; Roger T. Howe 1998 Ph.D. Dissertation
MEMS Microshells for Microneedles, Microscale Fluid Visualization, and Vacuum Packaging of Microdevices Kyle Lebouitz; Albert P. Pisano; Roger T. Howe; Dorian Liepmann 1998 Ph.D. Dissertation
An SOI Based, Fully Integrated Fabrication Process for High-Aspect-Ratio Microelectromechanical Systems Timothy Brosnihan; Albert P. Pisano; Roger T. Howe; David Dornfeld 1998 Ph.D. Dissertation
MicroElectroMechanical Devices and Fabrication Technologies for Radio-Frequency Analog Signal Processing Darrin Young; Bernhard E. Boser; Robert G. Meyer; Albert P. Pisano 1999 Ph.D. Dissertation
Integrated Mesoscopic Fluidic Interconnects for Micro-Machined Fluidic Devices Jennifer Ann Scalf; Albert P. Pisano; Dorian Liepmann 1999 Master's Thesis
Polysilicon Micromolding of Closed-Flow Passages for the Fabrication of Multifunctional Microneedles Neil Hamilton Talbot; Albert P. Pisano; Dorian Liepmann; Richard S. Muller 1999 Master's Thesis
Algorithms for Distributed Sensor Networks James D. McLurkin; Kristofer S. J. Pister 1999 Master's Thesis
Microrelay Design, Performance, and Systems Ezekiel Kruglick; Kristofer S.J. Pister; Roger T. Howe; Richard M. White; Dorian Liepmann 1999 Ph.D. Dissertation
Planar Microfluidics: Toward Large Scale Integration of Channels, Pumps, Valves, and Fluid Mixers in Microelectromechanical Systems (MEMS) John Evans; Dorian Liepmann; Albert P. Pisano; Roger T. Howe 1999 Ph.D. Dissertation
Design and Modeling of a Dual Mass SOI-MEMS Gyroscope Ashwin Seshia; Roger T. Howe; Kristofer S.J. Pister 1999 Master's Thesis