Publications

Title Author Yearsort descending Publication type
Integrated-Circuit-Compatible Electret and Condenser Ultrasonic Transducers Jonathan Bernstein; Richard M. White 1983 Ph.D. Dissertation
Integrated Silicon Electromechanical Vapor Sensor Roger T. Howe; Richard S. Muller; Richard M. White 1984 Ph.D. Dissertation
Pyroelectric ZnO Integrated Sensors Dennis L. Polla; Richard S. Muller; Richard M. White 1985 Master's Thesis
Design, Theory, and Applications of Integrable Carrier-Domain Magnetometers Juan Goicolea; Richard S. Muller 1986 Ph.D. Dissertation
A Tactile Sensor Utilizing Light Coupling Between Optical Fibers Vadim Konradi 1987 Master's Thesis
Low Temperature Silicon-Silicon Bonding with Oxides Leslie A. Field; Richard S. Muller 1988 Master's Thesis
Reactive Ion Etching of Zinc Oxide and Indium-Tin-Oxide Eric Minami; Richard M. White; Roger T. Howe 1988 Master's Thesis
Analysis and Characterization of the Vertical Carrier Domain Magnetometer Bret S. Burns; Richard S. Muller; Roger T. Howe 1989 Master's Thesis
IC-Processed Polysilicon Micromechanics: Technology, Material, and Devices Yu-Chong Tai; Richard S. Muller; Roger T. Howe 1989 Ph.D. Dissertation
Integrated Micromachinery -- Moving Structures on Silicon Chips Long-Sheng Fan; Richard S. Muller 1990 Ph.D. Dissertation
Formation, Properties, and Applications of Porous Silicon Rolfe Anderson; Richard S. Muller 1990 Ph.D. Dissertation
Polysilicon Microstructures to Characterize State Friction Martin Lim; Roger T. Howe; Roberto Horowitz 1990 Master's Thesis
Integrated Microphone with CMOS Circuits on a Single Chip Eun Sok Kim; Richard S. Muller 1990 Ph.D. Dissertation
Electrostatic Comb Drive for Resonant Sensor and Actuator Applications William C.-K. Tang; Roger T. Howe 1990 Master's Thesis
Thermal Applications of Microbridges Carlos Mastrangelo; Richard S. Muller 1990 Ph.D. Dissertation
Design, Fabrication, and Optimization of Micromechanical Flexures Young-Ho Cho; Albert P. Pisano; Roger T. Howe 1990 Ph.D. Dissertation
Micromechanical Electrostatic Voltmeter Charles Heng-Yuan Hsu; Richard S. Muller; Roger T. Howe 1991 Master's Thesis
Electromechanical Characterization of Microresonators for Circuit Applications Clark T.-C. Nguyen; Roger T. Howe 1991 Master's Thesis
Miniature Gaseous Light Sources Hsi-Jen Yeh; Richard S. Muller; Roger T. Howe 1991 Master's Thesis
Growth Stresses in Undoped LPCVD Polycrystalline Silicon Films Peter Krulevitch 1991 Master's Thesis
The Motion of a Pointer Tip Driven by Two Linked Electrostatic Comb Drives Ronald Fox 1991 Master's Thesis
Silicon Electromechanical Microgrippers: Design, Fabrication, and Testing Chang-Jin Kim; Albert P. Pisano; Richard S. Muller 1991 Ph.D. Dissertation
Microstructure Micropackaging Kristen M. McNair; Roger T. Howe; Richard M. White 1991 Master's Thesis
Fluid-Actuated Micromachined Rotors and Gears Leslie A. Field; Richard M. White 1991 Ph.D. Dissertation
The Optimal Kinematic Synthesis of Planar, Full Cycle, Constant-Velocity, Straight-Line Mechanisms Peter Hall Hodges; Albert P. Pisano 1991 Ph.D. Dissertation
Applications of Ultrasonic Lamb Waves Stuart Wenzel; Richard M. White 1992 Ph.D. Dissertation
Impact Actuation of Polysilicon Micromechanical Structures Abraham Lee; Albert P. Pisano; Roger T. Howe 1992 Ph.D. Dissertation
Fabrication of Exposed Gate Field Effect Transistors for Sensor Applications Albert William Flounders; Dennis W. Hess 1992 Ph.D. Dissertation
A Curved Teeth Flexible Comb Drive for Electrostatic Microgrippers Ken Chow 1992 Master's Thesis
Hinged Polysilicon Structures with Integrated CMOS Thin Film Transistors Kristofer S.J. Pister; Roger T. Howe 1992 Ph.D. Dissertation
A Surface Micromachined Accelerometer with Integrated CMOS Detection Circuitry Weijie Yun; Roger T. Howe 1992 Ph.D. Dissertation
High-Senstivity Micromechanical Electrostatic Voltmeter David Loconto; Richard S. Muller; Roger T. Howe 1992 Master's Thesis
Controlled Structure Release for Silicon Surface Micromachining David Monk; David S. Soane; Roger T. Howe; David B. Graves 1993 Ph.D. Dissertation
Large Displacement Electrostatic Microactuators With Polysilicon Flexure Suspensions Reid Alyn Brennen; Albert P. Pisano; Roger T. Howe; Homayoon Kazerooni 1993 Ph.D. Dissertation
Selective Encapsulations of MEMS: Micro Channels, Needles, Resonators and Electromechanical Filters Liwei Lin; Albert P. Pisano; Roger T. Howe; Van P. Carey 1993 Ph.D. Dissertation
Biochemical Microflow System / Microfabricated Optical Chopper Michael T. Ching; Richard M. White; Albert P. Pisano 1993 Master's Thesis
Modulated Infrared Source Peter Yung-Sen Chen; Richard S. Muller; Roger T. Howe 1993 Master's Thesis
Piezoresistive Sensing in Micromechanical Resonators Yorgen H. Anderson; Richard S. Muller; Richard M. White 1993 Master's Thesis
Gel-coated FPW Biosensors Amy Wang; Richard M. White 1993 Master's Thesis
Micromechanical Investigations of Silicon and Ni-Ti-Cu Thin Films Peter Krulevitch; George C. Johnson; Roger T. Howe; Kyriakos Kornvopoulos 1994 Ph.D. Dissertation
Micromechanisms Using Sidewall Beams Michael Judy; Roger T. Howe 1994 Ph.D. Dissertation
SPICE Analysis of a Micro Gyro and Mixed Analog-Digital Sensor Interface Circuit Amit Burstein; Chand R. Viswanathan; Kristofer S.J. Pister; William H. Kaiser 1994 Master's Thesis
Design and Analysis of Closed-loop Controlled Parallel-Plate Electrostatic MicroGrippers Patrick Breckow Chu; Kristofer S.J. Pister 1994 Master's Thesis
Micromachined Piezoelectric Microphones Robert P. Ried; Richard S. Muller 1994 Ph.D. Dissertation
Magnetic Microactuators with Polysilicon Flexures Jack William Judy; Richard S. Muller; Seth Sanders 1994 Master's Thesis
A Silicon-Based Microsensor to Measure Airborne Contaminants Bharat M. Shah; Richard M. White; Albert P. Pisano 1994 Master's Thesis
Simulation of Microelectromechanical Systems Gary Fedder; Roger T. Howe 1994 Ph.D. Dissertation
Design and Implementation of Sigma-Delta Force-Balance Microaccelerometers Crist Lu; Bernhard E. Boser; Roger T. Howe 1994 Master's Thesis
Micromechanical Signal Processors Clark T.-C. Nguyen; Roger T. Howe 1994 Ph.D. Dissertation
The Damping Mechanism in Single-Ended Tuning Fork Resonant Structures Gonnan K. Leung; Roger T. Howe 1995 Master's Thesis