Abstract:
We present the integration of CMOS-embedded subtractive microfluidics with single-photon avalanche diode (SPAD) fluorescence lifetime sensors, enabling independent channel addressability for parallel readout. Microfluidic channels are realized by selectively wet-etching the back-end-of-line (BEOL) metal routing above the SPAD sensors, reducing the analyte-to-active-region spacing to 7 μm while allowing for precision alignment. Simultaneous readout from two SPADs underneath two separate fluidic channels is demonstrated, establishing a pathway toward a scalable, multiplexed lab-on-CMOS biosensing platform.
Keywords: CMOS, SPAD, Fluorescence lifetime, TCSPC, Subtractive microfluidics, Lab-on-Chip, Biosensor
b2026p0001
Publication date:
January 25, 2026
Publication type:
Conference Paper (Proceedings)
Citation:
M. S. Ladabaum, A. Di, J. M. Bao, G. Tikhomirov and J. -C. Chien, "CMOS-Embedded Microfluidics for Channel-Addressable Parallel Readout of Spad Fluorescence Lifetime Sensors," 2026 IEEE 39th International Conference on Micro Electro Mechanical Systems (MEMS), Salzburg, Austria, 2026, pp. 1563-1566, doi: 10.1109/MEMS64181.2026.11419596. keywords: {Multiplexing;Semiconductor device measurement;Quantum dots;Fluorescence;Routing;Sensors;Biosensors;Microfluidics;Standards;Single-photon avalanche diodes;CMOS;SPAD;Fluorescence lifetime;TCSPC;Subtractive microfluidics;Lab-on-Chip;Biosensor}