Physical Sensors & Devices

Research that includes:

  • Silicon MEMS actuators: comb, electro-thermal, and plastic deformation
  • Precision electronic sensing and measurements of capacitive, frequency, and coulombic MEMS variables
  • Structures and architectures for gyroscopes, accelerometers, micro strain gauges for direct application to rigid structures e.g., steel, and levitated MEMS

BPN941: Ultrasound-Induced Haptic Interface

Fan Xia
Huicong Deng
Umut Can Yener
Wei Yue
2025

The next big thing, AR/VR, requires an immersive Human Machine Interface (HMI) in addition to visual and sound stimuli. Although skin is the biggest organ in the human body, very few efforts compared to visual and auditory senses have been done to develop a “sense of touch”. The mechanical stimulus to generate the touch sense by the embedded mechanoreceptors in the skin at different depths has been created in many ways as vibratory actuators, microneedles, etc. In this project, we are investigating to create haptic interface via radiation force generated by piezoelectric...

BPNX1036: Enhanced Gas Sensing with Machine Learning (New Project)

Yuan Gao
Wei Yue
2025

Accurate and real-time gas detection is crucial for applications ranging from environmental monitoring to industrial processes. Traditional methods are often limited by low accuracy, slow response times, and high costs. This project introduces a scalable machine learning fusion system that integrates sensor fusion techniques to enhance detection performance. With encoder-decoder architectures and a decision fusion model, our approach significantly improves the accuracy of carbon dioxide sensing, achieving a mean absolute percentage error (MAPE) of 2.97% while reducing response and recovery...

Fan Xia

Graduate Student Researcher
Mechanical Engineering
Professor Liwei Lin (Advisor)
Ph.D. 2025 (Anticipated)

Qiutong Jin

Graduate Student Researcher
Electrical Engineering and Computer Sciences
Professor Clark T.-C. Nguyen (Advisor)
Ph.D. 2025 (Anticipated)

Qiutong Jin received B.S. in Electrical Engineering from University of Iowa in 2019. She is currently pursuing a Ph.D. in MEMS in EECS at UC Berkeley under the supervision of Prof. Clark Nguyen and will graduate in May 2025.

Fall 2023 Research Review Presenter


BPN951: Berkeley Low-cost Interplanetary Solar Sail (BLISS)

Alexander Alvara
Bhuvan M. Belur
2024

Space exploration often costs multiple millions of dollars for each exploratory mission to get a single piece of equipment into orbit. These missions usually return information in the form of scans or images or samples in the form of extracted material. This work proposes the manufacture and deployment of thousands of imaging capable solar sails systems with 10 gram payloads. Power generation is enabled through solar panels and batteries. Navigation is enabled through one square meter solar sails maneuvered by inchworm motors. Communications are enabled by laser transmitters and SPAD...

BPNX1033: Multi-Objective Inverse Design of Impact Resistant Metamaterials Under Varying Strain Rates (New Project)

Anish Satpati
Marco Maurizi
2024

This work pertains to the multi-objective inverse design of impact-resistant metamaterials under varying strain rates. Impact-resistant materials are desirable in a wide range of applications, such as sports, automobiles, military, and aircraft, to name a few. Existing literature deals with refining these structures by performing quasi-static finite element (FE) simulations and then verifying them experimentally, which is a time-consuming and expensive process. Moreover, beyond the low-velocity regime, quasi-static simulations are not representative of real-world dynamic...

BPNX1029: Multi-Mode Multi-Direction High-Resolution Tactile Haptics and Sensing Duo-Functional Device using Piezoelectric Metamaterial (New Project)

William Dong
Zac Gwennap
Brandon Anthony
Cole Dunn
2024

Tactile haptics and sensing technology plays a crucial role in the AR/VR and medical robotics fields by providing touch input and feedback for human-computer interactions. However, many existing haptics technologies offer limited feedback— only in one direction (normal stress), very coarse resolution, and only on/off control. These limitations hinder the accurate recreation of touch sensations, particularly on sensitive areas like fingertips, due to restricted degrees of freedom and inadequate stress density. This device addresses these issues by offering tactile haptics and sensing with...

BPNX1035: Six-Axis Control of Electrostatically Levitated 1g Mass (New Project)

Hani Gomez
Yichen Liu
Alexander Alvara
2024

The research focus of this project is to design, fabricate and develop a six-axis controlled electrostatically levitated mass system. While electrostatic levitation has been demonstrated before, this project focuses on developing a smaller form factor (10cmx10cm), low power (0.5W), and higher mass (1g) system. The proof mass will be levitated using actuation electrodes: four top electrodes for levitation and control of z-axis position as well as rotation about x- and y-axes, and six side electrodes for control of x- and y-axis position and z-axis rotation. To achieve stability...

BPNX1034: pMUT Bone Age Sensing

Nikita Lukhanin
Fan Xia
Megan Teng
Bo Jiang
Jean-Daniel Zanone
2024

It has been well established that the bone age of a child can be estimated by using X-ray, CT, MRI, and other large medical imaging devices. While other less expensive and non-radioactive methodology use ultrasonography, these devices are bulky and often require trained technicians to use properly. This project introduces a low-cost, miniaturized device for bone age assessments by microelectromechanical system (MEMS) technologies in the form of a piezoelectric micromachined ultrasound transducer (pMUT). By integrating Aluminum nitride (AlN) into our 5 mm pMUT, we are capable of...

Lego-Like Reconfigurable Soft Haptic Array via Self-Healing Sensor/Actuator Modules

Peisheng He
Wenying Qiu
Yande Peng
Jong Ha Park
Qilong Cheng
David Bogy
Liwei Lin
2024

Soft haptic devices could enable unique applications in AR/VR, healthcare, and human-machine interface systems. Here, a versatile reconfigurable haptic system is proposed for different application scenarios at diverse anatomical locations and body shapes. Lego toys are the inspiration of the module concept where individual haptic modules can be cut, reconfigured, and reconnected as a new system in the ambient environment repeatedly.

Each module consists of the basic building block of flexible selfhealable ion-conducting and insulating layers....