NanoTechnology: Materials, Processes & Devices

Research that includes:

  • Development of nanostructure fabrication technology
  • Nanomagnetics, Microphotonics
  • CMOS Integrated Nanowires/Nanotubes (CMOS-Inn)

BPNX1041: Enhanced Hydrogen Detection in MOX-Based Gas Sensor via Amphiphilic Copolymer Blending

YoungJun Kim
Yaprak Ozbakir
Tzu-Chiao Wei
Carlo Carraro
2025

Chemiresistive hydrogen sensors employing metal oxides (MOX) are known for their high sensitivity, ease of fabrication, and cost-effectiveness. However, the poor dispersion of the MOX nanomaterials on the sensing platform can degrade the gas-sensing performance of films prepared using the drop-casting method. In this research, we have synthesized an amphiphilic copolymer, poly(tetrafluoro propyl methacrylate)-co-poly(oxyethylene methacrylate) (PTPO), using a facile free-radical polymerization technique. The PTPO copolymer serves as a surfactant, significantly enhancing the dispersion of...

BPNX1023: CMOS-Compatible Contact Engineering of 2D Semiconductors

Inha Kim
Dorottya Urmossy
Kyuho Lee
Naoki Higashitarumizu
2026

2D materials are among the most promising candidates for next-generation semiconductor devices due to their exceptional electronic transport properties and composition of a single atomic layer, which offers significant advantages for integration density. However, high contact resistance and challenges in doping present obstacles to their practical applications. In this work, we aim to explore various methods to overcome these issues and achieve technological breakthroughs that will enable these materials to become integral components in a wide range of applications.

...

William Dong

Graduate Student Researcher
Mechanical Engineering
Professor Clark T.-C. Nguyen (Advisor)
Ph.D. 2029 (Anticipated)

William (Shihong) Dong received his B.S. in Mechanical Engineering from University of Wisconsin-Madison in 2023. Now pursuing Ph.D. in Mechanical Engineering advised by Professor Clark T-C. Nguyen.

BSAC Fall 2025 Research Review Presenter

BPN995: Growth of Metal Organic Framework (MOF) Crystals under Microgravity and their Prospects for Chemical Sensing

YoungJun Kim
Yaprak Ozbakir
HyoJun Min
Carlo Carraro
Liam McDonough
Sai Munagavalasa
Pat Taedullayasatit
2025

Metal-organic frameworks (MOFs) are porous, high surface area materials that consist of metal-cluster nodes connected by organic linkers to form highly ordered structures with various pore geometries and chemical properties. Due to their unique and tunable structure, MOFs have shown substantial promise in a broad range of applications, including chemical sensing, gas adsorption and separation, and catalysis. To investigate the intrinsic properties of MOFs for their sensing performance, single crystals are ideal platforms that mitigate the impact of defects, impurities, and grain...

BPNX1007: Surface Tension-Driven Liquid Metal Actuator

Zihan Wang
Peisheng He
Wei Yue
2025

Surface tension plays an important role in miniaturized systems as the scaling law favors its relative significance over other forces such as gravity, magnetic, and structural stiffness. As such, surface tension effects have induced process issues in microfabrication such as stiction but also provided opportunities in using the surface tension to drive microdevices, such as those based on electrowetting-on-dielectric (EWOD), electrocapillary, and continuous electrowetting (CEW) mechanism, … etc. In this project, we exploit the giant outputs by the switching of surface tension...

Low Contact Resistance WSe2 p-Type Transistors with Highly Stable, CMOS-Compatible Dopants

Inha Kim
Naoki Higashitarumizu
I K M Reaz Rahman
Shu Wang
Hyong Min Kim
Jamie Geng
Rajiv Ramanujam Prabhakar
Joel W. Ager III
Ali Javey
2024

High contact resistance has been a bottleneck in developing high-performance transition-metal dichalcogenide (TMD) based p-type transistors. We report degenerately doped few-layer WSe2 transistors with contact resistance as low as 0.23 ± 0.07 kΩ·μm per contact by using platinum(IV) chloride (PtCl4) as the p-type dopant, which is composed of ions compatible with the complementary metal-oxide-semiconductor (CMOS) fabrication process. Top-gated devices with a gate length of 200 nm showed good switching behaviors, implying that the dopant diffusion into the gate stack is not significant. The...

Moisture-Induced Energy Harvesters by Water Harvesting for Continuous Arid Environment Operations

Jong Ha Park
Peisheng He
Sujoy K. Ghosh
Fan Xia
Nikita Lukhanin
Jundong Zhai
Ryan D. Rundle
Liwei Lin
2025

This study presents a novel moisture-induced energy harvester designed for the operation in arid environments. The dual-stage system integrates a water harvester (WH) to capture atmospheric moisture and an energy harvester (EH) to produce electricity. Key advancements of this work include: (1) continuous moisture-to-DC current outputs for more than four days, (2) operational under a low humidity (20%) condition, and (3) an ultrahigh energy density of 12.3 mJ/cm2 − 400 times higher than those of conventional moisture-based energy harvesters without using water harvesters. The proposed...

Exploring Characteristics of Palladium-loaded Tin (IV) Oxide Nanohybrids Towards Chemiresistive Gas Sensing

Yaprak Ozbakir
Zhou Li
Qi Zheng
Jiyun Hong
Jorge E. Perez-Aguilar
Simon R. Bare
Afnan Ali Alghannam
Nishit Goel
Stephen Bart
Carlo Carraro
Roya Maboudian
2025

Nanocrystalline pristine and Pd-loaded tin (IV) oxide (SnO2) nanocomposites with different loadings were synthesized via facile impregnation and in-situ reduction, followed by annealing. The crystal structure and morphology of the samples were characterized by X-ray diffraction, scanning electron microscopy and transmission electron microscopy. X-ray photoelectron spectroscopy, Raman spectroscopy and ex-situ extended X-ray
absorption fine structure (EXAFS) confirm PdO nanoclusters stabilized on SnO2 surface. Results revealed that Pd/SnO2 with 2.8 wt% loading exhibits the best sensing...

Mid-Air Particle Manipulations by a 2x2 PMUT Array

Wei Yue
Megan Teng
Yande Peng
Fan Xia
Peggy Tsao
Yuan Gao
Shinsuke Ikeuchi
Yasuhiro Aida
Seiji Umezawa
Liwei Lin
2024

This work reports a platform based on ultrasound for mid-air particle manipulations using a 2×2 piezoelectric micromachined ultrasonic transducer (pMUT) array. Three achievements have been demonstrated as compared to the state-of-art: (1) high SPL (sound pressure level) of 120 dB at a distance 12 mm away by an individual lithium-niobate pMUT; (2) a numerically simulated and experimentally demonstrated 2D focal point control scheme by adjusting the phase-delay of individual pMUTs; and (3) the experimental demonstration of moving a 0.7 mg foam plastic particle of 12 mm away in the mid-air by...

Untethered Subcentimeter Flying Robots

Fanping Sui
Wei Yue
Kamyar Behrouzi
Yuan Gao
Mark Mueller
Liwei Lin
2025

The miniaturization of insect-scale flying robots with untethered flights is extremely challenging as the tradeoff between mass and power becomes problematic. Here, a subcentimeter rotating-wing robot of 21 mg in weight and 9.4 mm in wingspan driven by a single-axis alternating magnetic field has accomplished navigable flights. This artificial flying robot is the lightest and smallest to realize untethered and controllable aerial travels including hovering, collision recovery, and route adjustments. Experimentally, it has achieved a high aerodynamic efficacy with a measured lift-to-drag...