NanoTechnology: Materials, Processes & Devices

Research that includes:

  • Development of nanostructure fabrication technology
  • Nanomagnetics, Microphotonics
  • CMOS Integrated Nanowires/Nanotubes (CMOS-Inn)

Low Contact Resistance WSe2 p-Type Transistors with Highly Stable, CMOS-Compatible Dopants

Inha Kim
Naoki Higashitarumizu
I K M Reaz Rahman
Shu Wang
Hyong Min Kim
Jamie Geng
Rajiv Ramanujam Prabhakar
Joel W. Ager III
Ali Javey
2024

High contact resistance has been a bottleneck in developing high-performance transition-metal dichalcogenide (TMD) based p-type transistors. We report degenerately doped few-layer WSe2 transistors with contact resistance as low as 0.23 ± 0.07 kΩ·μm per contact by using platinum(IV) chloride (PtCl4) as the p-type dopant, which is composed of ions compatible with the complementary metal-oxide-semiconductor (CMOS) fabrication process. Top-gated devices with a gate length of 200 nm showed good switching behaviors, implying that the dopant diffusion into the gate stack is not significant. The...

Moisture-Induced Energy Harvesters by Water Harvesting for Continuous Arid Environment Operations

Jong Ha Park
Peisheng He
Sujoy K. Ghosh
Fan Xia
Nikita Lukhanin
Jundong Zhai
Ryan D. Rundle
Liwei Lin
2025

This study presents a novel moisture-induced energy harvester designed for the operation in arid environments. The dual-stage system integrates a water harvester (WH) to capture atmospheric moisture and an energy harvester (EH) to produce electricity. Key advancements of this work include: (1) continuous moisture-to-DC current outputs for more than four days, (2) operational under a low humidity (20%) condition, and (3) an ultrahigh energy density of 12.3 mJ/cm2 − 400 times higher than those of conventional moisture-based energy harvesters without using water harvesters. The proposed...

Exploring Characteristics of Palladium-loaded Tin (IV) Oxide Nanohybrids Towards Chemiresistive Gas Sensing

Yaprak Ozbakir
Zhou Li
Qi Zheng
Jiyun Hong
Jorge E. Perez-Aguilar
Simon R. Bare
Afnan Ali Alghannam
Nishit Goel
Stephen Bart
Carlo Carraro
Roya Maboudian
2025

Nanocrystalline pristine and Pd-loaded tin (IV) oxide (SnO2) nanocomposites with different loadings were synthesized via facile impregnation and in-situ reduction, followed by annealing. The crystal structure and morphology of the samples were characterized by X-ray diffraction, scanning electron microscopy and transmission electron microscopy. X-ray photoelectron spectroscopy, Raman spectroscopy and ex-situ extended X-ray
absorption fine structure (EXAFS) confirm PdO nanoclusters stabilized on SnO2 surface. Results revealed that Pd/SnO2 with 2.8 wt% loading exhibits the best sensing...

Mid-Air Particle Manipulations by a 2x2 PMUT Array

Wei Yue
Megan Teng
Yande Peng
Fan Xia
Peggy Tsao
Yuan Gao
Shinsuke Ikeuchi
Yasuhiro Aida
Seiji Umezawa
Liwei Lin
2024

This work reports a platform based on ultrasound for mid-air particle manipulations using a 2×2 piezoelectric micromachined ultrasonic transducer (pMUT) array. Three achievements have been demonstrated as compared to the state-of-art: (1) high SPL (sound pressure level) of 120 dB at a distance 12 mm away by an individual lithium-niobate pMUT; (2) a numerically simulated and experimentally demonstrated 2D focal point control scheme by adjusting the phase-delay of individual pMUTs; and (3) the experimental demonstration of moving a 0.7 mg foam plastic particle of 12 mm away in the mid-air by...

Untethered Subcentimeter Flying Robots

Fanping Sui
Wei Yue
Kamyar Behrouzi
Yuan Gao
Mark Mueller
Liwei Lin
2025

The miniaturization of insect-scale flying robots with untethered flights is extremely challenging as the tradeoff between mass and power becomes problematic. Here, a subcentimeter rotating-wing robot of 21 mg in weight and 9.4 mm in wingspan driven by a single-axis alternating magnetic field has accomplished navigable flights. This artificial flying robot is the lightest and smallest to realize untethered and controllable aerial travels including hovering, collision recovery, and route adjustments. Experimentally, it has achieved a high aerodynamic efficacy with a measured lift-to-drag...

Kadircan Godeneli

Graduate Student Researcher
Electrical Engineering and Computer Sciences
Professor Alp Sipahigil (Advisor)
Ph.D. 2026 (Anticipated)
Kadircan received his B.S. degrees in Electrical Engineering and Physics from Bogazici University, Istanbul, Turkey in 2021. He is currently pursuing a Ph.D. in the Quantum Devices Group at UC Berkeley under the supervision of Prof. Alp Sipahigil.

William Dong

Graduate Student Researcher
Mechanical Engineering
Professor Clark T.-C. Nguyen (Advisor)
Ph.D. 2029 (Anticipated)

William (Shihong) Dong received his B.S. in Mechanical Engineering from University of Wisconsin-Madison in 2023. Now pursuing Ph.D. in Mechanical Engineering advised by Professor Clark T-C. Nguyen.

BPN993: Roll-to-Roll Fabrication of Flexible Batteries

Jong Ha Park
Benjamin Toppel
Peisheng He
2025

Safe and deformable soft batteries are highly desirable for applications such as mobile electronics and conformable systems on irregular surfaces. Conventional Li-ion batteries rely on rigid packaging and hermetic sealing to block moisture intrusion and prevent leakage of toxic, flammable organic electrolytes. In contrast, recently reported deformable or stretchable batteries provide good conformability but suffer rapid performance degradation in ambient conditions, limiting their operating lifetimes. The fundamental challenge is that mechanical softness and gas impermeability are mutually...

BPNX1021: Realizing Three-Dimensional Alignment of Two-Dimensional Material for Isotropic Properties Enhancement via Embedded Direct Ink Writing

Qiyi Chen
2024

The orientation of fibrous fillers, induced by shear forces during extrusion, has been demonstrated to significantly enhance mechanical properties, electrical/thermal conductivity, microwave attenuation etc., albeit primarily in a two-dimensional (2D) x-y plane. In this study, we present a novel approach for achieving fiber alignment in a three-dimensional (3D) context, with an emphasis on the Z-direction, by utilizing embedded 3D printing techniques. This process involves the extrusion and suspension of composite inks within a viscoelastic gel medium, during which the...

BPNX1059: Electric Field Control of Quantum Emitters in Silicon (New Project)

Lukasz Komza
Hanbin Song
Niccolo Fiaschi
Enrique Garcia
Ahmet Oguz Sakin
2025

Color centers in silicon are promising building blocks for photonic quantum processors. The T center, with its long spin coherence and telecom-band optical transitions, is a particularly compelling candidate for quantum repeater and memory applications. However, the impact of local charges and spins introduced during device integration remains poorly understood. In this work, we develop a silicon photonics platform that enables probing of single T centers under applied electric and magnetic fields, allowing systematic investigation of Stark shifts and ionization dynamics. These...