NanoTechnology: Materials, Processes & Devices

Research that includes:

  • Development of nanostructure fabrication technology
  • Nanomagnetics, Microphotonics
  • CMOS Integrated Nanowires/Nanotubes (CMOS-Inn)

BPNX1072: Fabrication of Porous Metal Oxides via Copolymer Templating for High-Performance Gas Sensors (New Project)

Tzu-Chiao Wei
YoungJun Kim
HyoJun Min
Yaprak Ozbakir
Carlo Carraro
2026

Metal oxide semiconductors (MOX) are widely utilized in chemiresistive gas sensing owing to their exceptional stability and versatility. Integrating porosity into these materials is critical for enhancing performance, as it expands the surface area available for gas interaction. By providing a greater number of active sites, these porous structures improve overall sensitivity and facilitate rapid gas-surface exchanges, leading to optimized response and recovery times. In this study, we utilized an amphiphilic block copolymer as a template to engineer the porous structure of SnO2...

BPNX1071: Machine Learning for Targeted Discovery of Selective Gas-Sensing Materials (New Project)

Jiaxin Liu
2026

Chemiresistive gas sensors play a critical role in environmental monitoring, industrial safety, and medical diagnostics, where high selectivity toward specific target analytes is of paramount importance but remains challenging. Among various sensing materials, SnO₂ is one of the most widely used materials in commercial gas-sensing platforms due to its high sensitivity, low cost, and technological maturity. Conventional strategies to improve selectivity in SnO₂-based sensors primarily rely on metal doping or loading, which modulates surface reactions and electronic...

BPNX1057: Micromechanical Resonator Aging Rate Reduction

Kathy Doan
Xintian Liu
Kevin H. Zheng
2026

This project aims to demonstrate superior aging-resistance for micromechanical resonators via methods that remove or immobilize defects and other non-idealities towards a lower material energy state. One such method to be explored is localized annealing, whereby fast, high-temperature Joule heating at the micron scale provides a method for tailoring the morphology of a resonator's structural material.

Project is currently funded by: Federal

BPNX1049: Diamond Micromechanics

Kevin H. Zheng
Neil Chen
William Dong
2026

While silicon has been the workhorse for much of the MEMS sensor industry, it has its shortcomings when compared to other materials that might be used, namely diamond. Diamond has advantages over silicon in Young’s modulus, quality factor, and surface inertness, all of which could contribute to improved MEMS device performance. This project specifically employs diamond to increase the velocity of resonant mechanical structures towards better performance for sensors and frequency control devices.

Project is currently funded by: Federal

BPNX1028: Scalable Low-Temperature Processing of Chalcogen and Chalcogenide for Infrared Luminescence

Shu Wang
Naoki Higashitarumizu
2026

Scalable growth and processing of high-quality semiconductors, the active component of devices, is the foundation of modern electronics. We are interested in chalcogen and chalcogenide, with their appealing optical properties in infrared and potential low-temperature wafer-scale production, as promising material for optoelectronics. In this project, we develop new methods for controlled and scalable production of optically active tellurium, telluride, and other chalcogenide.

Project is currently funded by: Federal

BPN993: Roll-to-Roll Fabrication of Flexible Batteries

Jong Ha Park
Benjamin Toppel
Peisheng He
2026

Safe and deformable soft batteries are highly desirable for applications such as mobile electronics and conformable systems on irregular surfaces. Conventional Li-ion batteries rely on rigid packaging and hermetic sealing to block moisture intrusion and prevent leakage of toxic, flammable organic electrolytes. In contrast, recently reported deformable or stretchable batteries provide good conformability but suffer rapid performance degradation in ambient conditions, limiting their operating lifetimes. The fundamental challenge is that mechanical softness and gas impermeability are mutually...

BPN953: Long-Term Drift of MEMS-Based Oscillators

Neil Chen
Kevin H. Zheng
Xintian Liu
Qiutong Jin
2026

This project seeks to characterize and de-mystify mechanisms behind long-term drift in MEMS-based oscillators, including ones employing various sustaining amplifiers and referenced to resonators constructed in a variety of materials, including silicon, polysilicon, AlN, diamond, and ruthenium. A measurement apparatus that suppresses unwanted sources of drift, e.g., temperature, to better focus on resonator and oscillator long-term drift will be instrumental to success and will likely entail the use of double or triple ovens, as well as environment resistant circuit design.

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BPNX1066: Tunable Ultrahigh-Impedance Superconducting Resonators for Quantum Transduction (New Project)

Tae Gyu Ahn
Zihuai Zhang
2026

We are developing a DC-tunable, high-impedance superconducting resonator platform based on strongly disordered TiN thin films with large kinetic inductance (~90 pH/sq). The high sheet inductance enables nanowire resonators with characteristic impedances larger than the resistance quantum, thereby enhancing voltage zero-point fluctuations and coupling to individual and ensemble two-level systems (TLS), including defects in bulk silicon. By injecting a DC bias current through the nanowire, the kinetic inductance and thus the resonance frequency can be continuously tuned via current...

BPNX1056: Acceptor-Mediated Coupling of Superconducting Circuits to Silicon Nanomechanics

Kadircan Godeneli
2026

Superconducting qubits are among the most promising platforms for realizing fault-tolerant, large-scale quantum computers. Despite rapid progress, challenges remain in extending coherence times and improving connectivity. Hybrid quantum systems that couple superconducting circuits to mechanical resonators provide a promising route to scalability. Notably, silicon nanomechanical resonators offer ultra-long lifetimes, and superconducting circuits interfaced with optomechanical cavities can enable microwave-to-optics quantum transduction. However, existing approaches that rely on...

BPNX1045: Scalable Bipolar Photodiodes for In-Sensor Spectral Computation

Jamie Geng
Dehui Zhang
Tyler Ferraro
Simon Starbuck
Dorottya Urmossy
2026

Machine learning enabled spectrometry has the potential to revolutionize fields like agriculture, field biology, and chemical metrology by allowing the identification of different targets in space via a spectral fingerprint. For example, fields of diseased crops requiring pesticides may show different reflectance spectra compared to healthy plants. However, current methods using a standard spectrometer and off-chip computer must acquire, transmit, then process complete reflectance or transmittance spectra, known as a hypercube, for every point of interest in space. This is costly in terms...