Publications

Micromachined Resonators

Dubravka Bilić
Roger T. Howe
Kristofer S.J. Pister
Roberto Horowitz
2001

In this work, we present approaches of making a micromachined resonators and oscillators. In the first study, we investigated the effects of anchoring on the resonator's performance. Using the Analog Devices BiMEMS integrated technology, double-ended tuning fork resonators have been fabricated with on-chip circuitry. The results show an improvement in the resonator's quality factor when using anchors with multiple contacts to the substrate. Resonators with frequencies up to 3MHz were tested at µTorr pressures to give quality factors as high as 58,000.

In order to reduce...

Miniature-Scale and Micro-Scale Rotary Internal Combustion Engines for Portable Power Systems

Kelvin Fu
A. Carlos Fernandez-Pello
Albert P. Pisano
Kristofer S.J. Pister
Dorian Liepmann
2001

This work describes the development of both miniature-scale and micro-scale rotary internal combustion engines. This work is part of a project to develop a portable, high specific energy, liquid hydrocarbon-fueled power supply. A Wankel-type rotary engine was chosen for development because of its self-valving operation, planar geometry, and the ability to extract either mechanical or electrical power. To investigate engine behavior and design issues, larger-scale "mini-rotary'' engines have been fabricated from 4 steel. Mini-rotary engine chambers are approximately 1000 mm3 to 1 700 mm3 in...

A System Supporting Tiny Networked Sensors

Jason Hill
David Culler
Kristofer S.J. Pister
2000

As the post-PC era emerges, several new niches of computer system design are taking shape with characteristics that are quite different from traditional desktop and server regimes. One of the most interesting of these new design regimes is networked sensors. The networked sensor is enabled, in part, by "Moore's Law" pushing computing and storage into a smaller, cheaper, lower-power unit. However, three other trends are equally important: complete systems on a chip, integrated low-power communication, and integrated low-power devices that interact with the physical world. The combination of...

CMOS Imaging Receivers for Free-Space Optical Communication

Brian Leibowitz
Kristofer S.J. Pister
Bernhard E. Boser
Andrew Packard
2004
Free-space optical communication is an attractive alternative to radio communication for low power, long-range communication between small devices, primarily because utilization of shorter radiation wavelengths allows for more directional transceivers. At the transmitter, increased directionality allows for reduced transmission power because a given receiver will collect a larger fraction of the radiated energy. At the receiver, increased directionality allows for greater...

Micromachined Mirrors

Robert Conant
Richard S. Muller
Kristofer S.J. Pister
Liwei Lin
2002

This dissertation discusses the fundamental limits of scanning mirror design, focusing on the limitations due to the interaction between mechanical properties (mirror flatness and dynamic deformation), and optical properties (beam divergence and optical resolution). The performance criteria for both resonant-scanning mirrors and steady-state, beam-positioning mirrors are related to the mirror geometries, desired optical resolution, material properties, and mechanical resonant frequencies. The optical resolution of the scanning mirror is linearly dependent on the mirror length, so longer...

Algorithms for Distributed Sensor Networks

James D. McLurkin
Kristofer S.J. Pister
1999

A distributed sensor network is many (100-10000) autonomous sensor nodes spread out over a large area. Each node is equipped with a processor, mission-specific sensors, and short-range communications. Local interactions between sensor nodes allow them to reach global conclusions from their data. This work develops algorithms that allow:

The group to establish robust spatial patterns of messages The group to develop a communications network by dividing tasks among themselves Each mote to determine its position in physical space based on their location in the network topology Each mote...

Designing Metamaterials with Programmable Nonlinear Responses and Geometric Constraints in Graph Space

Marco Maurizi
Derek Xu
Yu-Tong Wang
Desheng Yao
David Hahn
Mourad Oudich
Anish Satpati
Mathieu Bauchy
Wei Wang
Yizhou Sun
Yun Jing
Rayne Zheng
2025

Advances in data-driven design and additive manufacturing have substantially accelerated the development of truss metamaterials—three-dimensional truss networks—offering exceptional mechanical properties at a fraction of the weight of conventional solids. While existing design approaches can generate metamaterials with target linear properties, such as elasticity, they struggle to capture complex nonlinear behaviours and to incorporate geometric and manufacturing constraints—including defects—crucial for engineering applications. Here we present GraphMetaMat, an autoregressive graph-based...

3D Imaging via Four PMUT Receivers by Compressed Sensing

Nikita Lukhanin
Divij Muthu
Chaoying Gu
Megan Teng
Kamyar Behrouzi
Chun-Ming Chen
Laura Waller
Liwei Lin
2026

We have successfully demonstrated three-dimensional (3D) ultrasound imaging via compressed sensing using piezoelectric micromachined ultrasonic transducers (pMUTs). This work reports the first experimental demonstration of compressed sensing with pMUTs, achieving 3D image reconstruction near the acoustic wavelength limit by only four receiving elements. Pseudo-random transmission signatures were encoded through frequency and delay modulation to enable high-fidelity reconstruction with a peak signal contrast of 28.7 dB. A 16-element lithium-niobate pMUT array operating at a resonant...

Ultra-Sensitive Nanosensor for Rapid Detection of PFAS in Simulated Drinking Water

Nikita Lukhanin
Keming Bai
Mia Wang
Declan M. Fitzgerald
Grigory Tikhomirov
Liwei Lin
2026

Per- and polyfluoroalkyl substances (PFAS) are a class of persistent synthetic compounds, often called “forever chemicals,” that pose a significant threat to public health and the environment. Standard detection methods primarily rely on liquid chromatography and mass spectrometry [1], which is expensive, time-intensive, and requires trained personnel and laboratory infrastructure. While emerging approaches using metal-organic frameworks (MOFs), molecularly imprinted polymers, and lateral flow assays have been explored, they have yet to provide a solution that simultaneously offers part-...

CMOS-Embedded Microfluidics for Channel-Addressable Parallel Readout of SPAD Fluorescence Lifetime Sensors

Max Ladabaum
Alexander Di
Julian M. Bao
Grigory Tikhomirov
Jun-Chau Chien
2026

We present the integration of CMOS-embedded subtractive microfluidics with single-photon avalanche diode (SPAD) fluorescence lifetime sensors, enabling independent channel addressability for parallel readout. Microfluidic channels are realized by selectively wet-etching the back-end-of-line (BEOL) metal routing above the SPAD sensors, reducing the analyte-to-active-region spacing to 7 μm while allowing for precision alignment. Simultaneous readout from two SPADs underneath two separate fluidic channels is demonstrated, establishing a pathway toward a scalable, multiplexed lab-on-CMOS...