Publications

We present the integration of CMOS-embedded subtractive microfluidics with single-photon avalanche diode (SPAD) fluorescence lifetime sensors, enabling independent channel addressability for parallel readout. Microfluidic channels are realized by selectively wet-etching the back-end-of-line (BEOL) metal routing above the SPAD sensors, reducing the analyte-to-active-region spacing to 7 μm while allowing for precision alignment. Simultaneous readout from two SPADs underneath two separate fluidic channels is demonstrated, establishing a pathway toward a scalable, multiplexed lab-on-CMOS...

This paper presents the first implementation of 100- nm-wide nanofluidics in a 65-nm CMOS chip using a one- step wet-etch to remove the copper routing from the back- end-of-line (BEOL) while maintaining transistor integrity through continuous monitoring of the IDS-VGS characteristics. Vertical fluidics are also successfully demonstrated by etching through 360 nm × 360 nm-sized vias. A non-destructive laser microscopy technique for imaging fluidic channels at a dimension below the visible- light wavelength is developed.

Keywords: CMOS, subtractive nanofluidics, microfluidics, BEOL...

The evolution of superconducting quantum processors is driven by the need to reduce errors and scale for fault-tolerant computation. Reducing physical qubit error rates requires further advances in the microscopic modeling and control of decoherence mechanisms in superconducting qubits. Piezoelectric interactions contribute to decoherence by mediating energy exchange between microwave photons and acoustic phonons. Centrosymmetric materials like silicon and sapphire do not display piezoelectricity and are the preferred substrates for superconducting qubits. However, the broken...

This thesis presents the design, fabrication, testing, and performance analysis of micromechanical resonant switches, or "resoswitches," as an innovative alternative to traditional transistor-based components in ultra-low-power wireless communication systems. By harnessing mechanical resonance, resoswitches introduce a novel paradigm for energy efficient receivers with promising applications in remote sensing, RFID, environmental monitoring, and other domains where power conservation is crucial. Unlike conventional electronic components, resoswitches consume no standby power, allowing for...