BioMEMS

Research that includes:

  • Immunosensors
  • Single Cell Analysis
  • Cell Manipulation and Probing
  • SERS BioImaging
  • Micro Total Analysis Systems uTAS
  • DNA Transformations
  • Cell Cryropreservation
  • Optoelectronic Transport & Tweezers

Alignment-Free, Non-Invasive Blood Vessel Monitoring by Piezoelectric Micromachined Ultrasonic Transducers

Fan Xia
Yande Peng
Wei Ji
Gurnoor Saini
Yen-Chen Wang
Aalaya Wudaru
Xiaoyang Yu
Mingze Luo
Ariane De Guzman
Zihan Wang
Yuguang Yuan
Jun-Chau Chien
Liwei Lin
2025

This work presents an alignment-free blood vessel monitoring microsystem based on a piezoelectric micromachined ultrasonic transducer (pMUT) array using a beam steering scheme. Compared with the literature, three key achievements include: (1) quantifications for the impact of misalignments during the ultrasound detection of a brachial artery; (2) a beam steering strategy without manual alignment to expand the field of view; (3) a new technique based on the fast Fourier transform (FFT) phase shift to measure relative location changes of the anterior and posterior artery wall. Validations on...

Daeun Sung

Graduate Student Researcher
Electrical Engineering and Computer Sciences
Professor Ali Javey (Advisor)
Ph.D. 2031 (Anticipated)

Daeun Sung is a PhD student in Electrical Engineering and Computer Sciences (EECS) at UC Berkeley. She received her B.S. and M.S. degrees in Biomedical Engineering from Korea University. She is currently advised by Prof. Ali Javey, conducting research on wearable bioelectronics, skin-conformal biosensors, and soft robotic sensing systems for biomedical applications.

BPN941: Ultrasound-Induced Human-Machine Interface

Declan M. Fitzgerald
Umut Can Yener
Mostafa Sedky
Huicong Deng
Fan Xia
Wei Yue
2026

As smart devices dominate larger areas of day-to-day life, their ability to communicate with human users must improve. While skin is the largest organ in the human body, relatively few efforts have gone toward developing more adaptive ways to utilize the "sense of touch" compared to visual and auditory signaling. The mechanical stimulus to generate a sense of touch by the embedded mechanoreceptors in the skin at different depths has been created in previous ways via vibratory actuators, requiring bulky and specialized offset masses and motors. In this project, we are investigating the...

CMOS-Embedded Microfluidics for Channel-Addressable Parallel Readout of SPAD Fluorescence Lifetime Sensors

Max Ladabaum
Alexander Di
Julian M. Bao
Grigory Tikhomirov
Jun-Chau Chien
2026

We present the integration of CMOS-embedded subtractive microfluidics with single-photon avalanche diode (SPAD) fluorescence lifetime sensors, enabling independent channel addressability for parallel readout. Microfluidic channels are realized by selectively wet-etching the back-end-of-line (BEOL) metal routing above the SPAD sensors, reducing the analyte-to-active-region spacing to 7 μm while allowing for precision alignment. Simultaneous readout from two SPADs underneath two separate fluidic channels is demonstrated, establishing a pathway toward a scalable, multiplexed lab-on-CMOS...

BPNX1039: Computational Biosensing with Compute-in-Memory for Aptamer Array

Yu-Chen Chang
2025

Aptamers, often referred to as ""synthetic antibodies,"" are nucleic acid-based molecules that selectively bind to target analytes in complex biological samples, such as whole blood. They can undergo reversible structural changes upon binding, allowing for real-time detection. By conjugating electroactive reporters to aptamers, these structural changes can be monitored electrochemically. Due to their reagentless nature, these biosensors are highly suitable for both in vitro and in vivo applications. Our lab specializes in aptamer-based sensors and has published several studies on their...

BPN924: Multimodality Platform for Neurogenesis and Neural Signal Recording After Stroke

Wentian Mi
2024

Stroke is a leading cause of disability in the United States. Recovery from stroke is complex and ultimately limited by the brains limited ability to regenerate damaged tissue. Ideally, we would want to drive neurogenesis and angiogenesis in a stroke lesion to aid in recovery. We propose a multimodality platform for stimulating neurogenesis which simultaneously allows for electrophysiological recording of neurons in the lesion area after stroke. Our aim is to provide a paradigm for making complex substrates for nervous tissue. With various devices integrated, multiple functions can be...

BPN884: Single Atom Catalysts for Robust Gas Sensing

Doyeon Bang
2018

Proton transportation is ubiquitous in biological signaling as well as enabled a broad range of modern device components. However, proton conductor using tunable, controllable and mass producible biological material is not yet developed for in vivo application to interface biological system. Here, we demonstrate anisotropic proton transport in the artificially aligned collagen fiber network, which is mimicking the nematic structure of the muscle fiber to show that aligned collagen can assist biological signaling as a protonic highway. Artificially aligned nematic collagen fiber...

BPN685: Real-Time Intraoperative Fluorescence Imager for Microscopic Residual Tumor in Breast Cancer

Efthymios Papageorgiou
Rozhan Rabban
Rebekah Zhao
Mekhail Anwar
2019

Successful treatment of early stage cancer depends on the ability to resect both gross and microscopic disease, yet no method exists to identify residual cancer cells intraoperatively. This is particularly problematic in breast cancer, where microscopic residual disease can double the rate of cancer returning, from 15% to 30% over 15 years, affecting a striking 37,500 U.S. women annually. Currently, residual disease can only be identified by examining excised tumors under a microscope, visualizing tumor cells stained with specific tumor markers. This microscopic evaluation restricts...

Jordan L. Edmunds

Alumni
Electrical Engineering and Computer Sciences
Professor Michel M. Maharbiz (Advisor)
Ph.D. 2022

NT21: Corona MEMS for Wide Study Area Air Particulate Monitoring

Beelee Chua
2005

(a) To miniaturize airborne particulates sizing and counting apparatus for ubiquitous deployment in air quality monitoring and epidemiological studies. (b) Multitudes of such devices can be deployed over a wide study area (such as downtown Sacramento) to monitor the air quality in situ and generate air particulates spatial and temporal maps. (c) To extend the applications of micro corona discharge device to micro ozone generator for biological sterilizing units, localized ESD control and other EHD-based fluid actuation applications.

Project end date: 02/06/06