BPNX1049: Diamond Micromechanics (New Project)

While silicon has been the workhorse for much of the MEMS sensor industry, it has its shortcomings when compared to other materials that might be used, namely diamond. Diamond has advantages over silicon in Young’s modulus, quality factor, and surface inertness, all of which could contribute to improved MEMS device performance. This project specifically employs diamond to increase the velocity of resonant mechanical structures towards better performance for sensors and frequency control devices.

Project is currently funded by: Federal