Roger T. Howe (Advisor)

Michel M. Maharbiz

Professor
Electrical Engineering and Computer Sciences
Berkeley Sensor & Actuator Center (BSAC)
Ph.D. 2003

Michel M. Maharbiz is a professor in the Department of Electrical Engineering and Computer Science at the University of California, Berkeley and a Co-Director of the Berkeley Sensor & Actuator Center.

Professor Maharbiz's research focuses on the extreme miniaturization of technology focused on building synthetic interfaces to cells and organisms. He is one of the inventors of "neural dust", an ultrasonic interface for vanishingly small implants in the body. His group is also known for developing the world’s first remotely radio-controlled...

Kristofer S.J. Pister

Professor
Electrical Engineering and Computer Sciences
Berkeley Sensor & Actuator Center (BSAC)
Ph.D. 1992

Kristofer S.J. Pister is a professor in the Department of Electrical Engineering and Computer Sciences at the University of California, Berkeley and a Co-Director of the Berkeley Sensor & Actuator Center.

Professor Pister's research interests include Autonomous microsystems: silicon micro-robots and wireless sensor networks. MEMS, low power circuits, energy scavenging.

Prior to joining the faculty at UC Berkeley, Professor Pister was an assistant professor in the Department of Electrical Engineering at the University of...

Clark T.-C. Nguyen

Professor
Electrical Engineering and Computer Sciences
Berkeley Sensor & Actuator Center (BSAC)
Ph.D. 1994

Clark T.-C. Nguyen is the Faculty Executive Director of the Berkeley Sensor & Actuator Center and the Conexant Distinguished Professor of Electrical Engineering and Computer Sciences at the University of California at Berkeley. His research interests include integrated vibrating micromechanical signal processors and sensors, merged circuit/micromechanical technologies, timing, and frequency control, RF communication architectures, and integrated circuit design and technology. Prior to joining the faculty at UC Berkeley in 2006, Professor Nguyen was a professor of...

Simulation of Microelectromechanical Systems

Gary Fedder
Roger T. Howe
1994
This thesis describes a general system simulation of microelectromechanical systems (MEMS) based on lumped-parameter modeling. First-order analytic models are derived for mechanical equations of motion of a suspended plate, squeeze-film damping,...

A Surface Micromachined Accelerometer with Integrated CMOS Detection Circuitry

Weijie Yun
Roger T. Howe
1992
A surface micromachined, capacitive accelerometer is described which integrates the mechanical sensing microstructures with CMOS detection circuits. The capacitive sensing structure consists of two polysilicon layers with the sensing and feedback electrodes...

Electrostatic Comb Drive for Resonant Sensor and Actuator Applications

William C.-K. Tang
Roger T. Howe
1990

Interdigitated finger (comb) structures are demonstarted to be effective for electrostatically exciting the resonance of polycrystalline-silicon (polysilicon) microstrucutres parallel to the plane of the substrate. Linear plates suspended by a pair of folded-cantilever truss as well as torsional plates suspended by spiral and serpentine springs are fabricated from a 2 um-thick phosphorus-doped low-pressure chemical-vapor deposited (LPCVD) polysilicon film. Three experimental methods are used to characterize quasi-static and resonant motions: microscopic illumination, observation with a...

William C.-K. Tang

Alumni
Electrical Engineering and Computer Sciences
Professor Roger T. Howe (Advisor)
Ph.D. 1990

Michael B. Cohn

Alumni
Electrical Engineering and Computer Sciences
Professor Roger T. Howe (Advisor)
Ph.D. 1997

Assembly Techniques for Microelectromechanical Systems

Michael B. Cohn
Roger T. Howe
1998
Batch microassembly techniques for MEMS and related systems are described. As an alternative to monolithic integration, these processes address the need for low-cost MEMS packaging, MEMS / CMOS integration, and large, sparse arrays of microfabricated devices. Two approaches are pursued. The first, self-assembly,...

Micromachined Vibratory Rate Gyroscopes

William A. Clark
Roger T. Howe
1997
A vibratory rate gyroscope has been developed and implemented using a micromachined mechanical element and integrated circuitry on the same silicon substrate. The mechanical element is a proof mass suspended by springs which is driven into lateral ...