This paper reports a highly directional air-coupled parametric loudspeaker using a single chip of piezoelectric micromachined ultrasonic transducers (pMUTs). Compared with the state-of-art technologies, three distinctive advancements have been achieved: (1) a micromachined parametric array based on CMOS-compatible bimorph AlN pMUTs; (2) generation of highly directional audible sound with a half power beam width less than 5 degrees; and (3) generation of multiple audible frequency using a single chip with 246 pMUT elements in a footprint of 13mm by 13mm. As such, the proposed AlN pMUT parametric array could open up a new class for low-power portable directional loudspeakers for private communication and so on.
January 25, 2021
Conference Paper (Proceedings)
Zhichun Shao, Sedat Pala, Yue Liang, Yande Peng, and Liwei Lin, "A Single Chip Directional Loudspeadker Based on PMUTS," Proceedings of 34th IEEE Micro Electro Mechanical Systems Conference, Virtual, Jan. 2021.