Liwei Lin (Advisor)

Research Advised by Professor Liwei Lin

Lin Group:  List of Projects | List of Researchers

High-SPL pMUT Array for Mid-Air Haptic Interface

Fan Xia
Yande Peng
Wei Yue
Chun-Ming Chen
Sedat Pala
Ryuichi Arakawa
Liwei Lin
2023

This paper presents a mid-air haptic interface device enabled by a piezoelectric micromachined ultrasonic transducer (pMUT) array achieving an unprecedentedly high transmission pressure of 2900 Pa at a 15 mm distance for the first time. The structure is based on sputtered potassium sodium niobate (K,Na)NbO3 (KNN) thin film with a high piezoelectric coefficient (e31 ~ 8-10 C/m2). A prototype KNN pMUT array composed of 15×15 dual-electrode circular-shape diaphragms exhibits a resonant frequency around 92.4 kHz. Testing results show a transmitting sensitivity of 120.8 Pa/cm2 per volt under...

High Sound Pressure Piezoelectric Micromachined Ultrasonic Transducers using Sputtered Potassium Sodium Niobate

Fan Xia
Yande Peng
Wei Yue
Mingze Luo
Megan Teng
Chun-Ming Chen
Sedat Pala
Xiaoyang Yu
Yuanzheng Ma
Megha Achary
Ryuichi Arakawa
Lane W. Martin
Liwei Lin
2024

This work presents air-coupled piezoelectric micromachined ultrasonic transducers (pMUTs) with high sound pressure level (SPL) under low-driving voltages by utilizing sputtered potassium sodium niobate K0.34Na0.66NbO3 (KNN) films. A prototype single KNN pMUT has been tested to show a resonant frequency at 106.3 kHz under 4 Vp-p with outstanding characteristics: (1) a large vibration amplitude of 3.74 μm/V, and (2) a high acoustic root mean square (RMS) sound pressure level of 105.5 dB/V at 10 cm, which is 5–10 times higher than those of AlN-based pMUTs at a similar frequency. There are...

Contactless Ultrasonic Fluid Viscosity and Density Monitoring

Pei-Chi Tsao
Samantha Averrit
Megan Teng
Haoyun (Jerry) Tang
Ting Chen
Yande Peng
Wei Yue
Liwei Lin
2025

This work introduces contactless ultrasonic fluid viscosity and density monitoring using piezoelectric micromachined ultrasonic transducers (pMUTs) for the first time. Key advancements include: (1) non-contact and simultaneous liquid viscosity and density measurements; (2) 98% classification accuracy for four tested liquids; and (3) a mean absolute error (MAE) of 0.79 cp for a viscosity range from 0.98 cp to 39.44 cp, and a MAE of 12.6 kg·m⁻³ for a density range from 997.8 to 1035.3 kg·m⁻³. By removing the requirement for the direct contract of MEMS sensors to the testing fluid, this...

Simultaneously Volumetric Temperature, Humidity, and Pressure Monitoring Based on Ultrasonic Signals

Megan Teng
Pei-Chi Tsao
Liwei Lin
2025

This work introduces the continuous volumetric measurement of temperature, humidity, and pressure using ultrasonic signals for the first time via PMUTs (piezoelectric micromachined ultrasonic transducers). Key advancements over existing methods include: (1) concurrent monitoring of temperature, relative humidity, and atmospheric pressure over 5 days by using ultrasonic signals; (2) volumetric measurements over a 5-meter distance in contrast to traditional localized point-measurements; and (3) the integration of machine learning for enhanced accuracy with RMSE errors of 0.13°C, 1.65% RH,...

Alignment-Free, Non-Invasive Blood Vessel Monitoring by Piezoelectric Micromachined Ultrasonic Transducers

Fan Xia
Yande Peng
Wei Ji
Gurnoor Saini
Yen-Chen Wang
Aalaya Wudaru
Xiaoyang Yu
Mingze Luo
Ariane De Guzman
Zihan Wang
Yuguang Yuan
Jun-Chau Chien
Liwei Lin
2025

This work presents an alignment-free blood vessel monitoring microsystem based on a piezoelectric micromachined ultrasonic transducer (pMUT) array using a beam steering scheme. Compared with the literature, three key achievements include: (1) quantifications for the impact of misalignments during the ultrasound detection of a brachial artery; (2) a beam steering strategy without manual alignment to expand the field of view; (3) a new technique based on the fast Fourier transform (FFT) phase shift to measure relative location changes of the anterior and posterior artery wall. Validations on...

Dynamic PMUTs Packaging Using Shape Memory Alloy

Megan Teng
Pei-Chi Tsao
Wei Yue
Fan Xia
Peisheng He
Yande Peng
Liwei Lin
2025

This work proposes a dynamic package scheme for piezoelectric micromachined ultrasonic transducers (PMUTs) by a Shape Memory Alloy (SMA) controlled platform to actively change the acoustic wave directivity patterns and frequency responses. Innovations include: (1) a shape-morphing package capable of switching between two states in seconds using SMA Nitinol wires; (2) a 278% increase in the received signal at 50 kHz between two states at an 45° angle; and (3) a design scheme by generative and surrogate machine learning models for optimal parameters according to desired outputs. The...

Advanced Design for Weakly Coupled Resonators by Automatic Active Optimization

Wei Yue
Yuan Gao
Fanping Sui
Jason Wang
Megan Teng
Peggy Tsao
Huicong Deng
Yande Peng
Liwei Lin
2025

Advanced design for weakly coupled resonators (WCRs) based on micro disk-shaped structures has been developed using an automatic active optimization (AAO) process with low coupling factors. Previous design methodologies have often used supervised learning (SL) with genetic algorithm for the optimization process but the limited initial design domain in the SL-based predictor often results in local instead of global optimizations. This AAO scheme can generate superior designs in the neighborhood of initial high-density dataset regions and add newly-found designs to the original dataset to...

Yuan Gao

Graduate Student Researcher
Mechanical Engineering
Professor Liwei Lin (Advisor)
Ph.D. 2028 (Anticipated)

Yuan Gao received his B.Eng. degree in Robotics Engineering from Peking University, Beijing, China, in 2023. He is currently pursuing a Ph.D. in Mechanical Engineering at the University of California, Berkeley. BSAC Fall 2026 Research Review Presenter

BSAC Fall 2026 Research Review Presenter

Huicong Deng

Graduate Student Researcher
Mechanical Engineering
Professor Ming C. Wu (Advisor)
Professor Liwei Lin (Advisor)
Ph.D. 2029 (Anticipated)

Huicong Deng received his B.E. in Electrical Engineering from University of Chinese Academy of Sciences in 2024. He is currently pursuing a Ph.D. degree in Mechanical Engineering, co-advised by Prof. Ming C. Wu and Prof. Liwei Lin. His research interest includes integrated photonics, MEMS and PMUTs.

BSAC Fall 2026 Research Review Presenter