We present a surface-tension driven electrochemical liquid metal (LM) actuator without the gas-producing sidereaction and capable of fabrication/operation in ambient air for practical applications. A hybrid supercapacitor is introduced to inhibit the common counter electrode side reactions, and the use of quasi-solid-state ionic hydrogel instead of liquid electrolyte further enables non-volatile operations. A 2×4 LM droplet array is demonstrated to actuate by a low driving voltage of 3.5 V for a maximum force of ~8.5 mN and a displacement of 0.56 mm in only 1.75 s. With the favorable scaling law of surface tension, further miniaturization could provide new opportunities in applications such as micro-robots, microfluidics, soft robots, and so on.
Abstract:
Publication date:
January 21, 2024
Publication type:
Conference Paper (Proceedings)
Citation:
X. Chen, Z. Wang, W. Yue, P. He and L. Lin, "A Non-Volatile Surface Tension-Driven Electrochemical Liquid Metal Actuator," 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS), Austin, TX, USA, 2024, pp. 705-708, doi: 10.1109/MEMS58180.2024.10439595. keywords: {Electrodes;Actuators;Liquids;Supercapacitors;Soft robotics;Electrolytes;Surface tension;Liquid Metal;Surface Tension;Electrochemical Actuator;Hydrogel},
*Only registered BSAC Industrial Members may view project materials & publications. Click here to request member-only access.