This project focuses on the design, fabrication, and development of a six-axis electrostatically levitated mass system. While electrostatic levitation has been previously demonstrated, the emphasis here is on achieving a compact form factor (10 cm × 10 cm), reduced power consumption (0.5 W), and increased levitated mass capacity. The proof mass is suspended using a system of actuation electrodes: four top electrodes provide levitation and control of vertical displacement (z-axis) as well as rotation about the x- and y-axes, while six side electrodes control lateral motion (x- and y-axes) and rotation about the z-axis. To ensure stable equilibrium, additional electrodes are employed for capacitive feedback sensing, complementing the actuation scheme. The system attains high impact resistance through electrical stiffening, achieved by biasing all actuation electrodes with a large DC voltage. To validate the design, a finite element model, analytical model for control, and a physical prototype fabricated using the substrate-released SOI process (BPN 735) have been developed, with experimental testing currently in progress.
Project is currently funded by: Federal