This paper reports an ultrasonic 3D object detector with > 1 meter range based on an AlN piezoelectric micromachined ultrasonic transducers (pMUTs) chip. Compared with the state-of-art technologies, three distinctive advancements have been achieved: (1) more than 1-meter in sensing distance enabled by a bimorph dual electrode pMUT design; (2) small form factor (6×6 mm2) and a more than 135o field of view; (3) capability of real time 3D object detection with up to 125 fps (frames per second) based on the scheme of ultrasound beamforming. As such, this work could open up a new class of miniaturized, low-power, real-time 3D object detections for applications such as drone navigation, machine vision and so on.
January 25, 2021
Conference Paper (Proceedings)
Zhichun Shao, Yande Peng, Sedat Pala, Yue Liang, and Liwei Lin, "3D Ultrasonic Object Detections with >1 Meter Range," Proceedings of 34th IEEE Micro Electro Mechanical Systems Conference, Virtual, Jan. 2021.