Physical Sensors & Devices

Research that includes:

  • Silicon MEMS actuators: comb, electro-thermal, and plastic deformation
  • Precision electronic sensing and measurements of capacitive, frequency, and coulombic MEMS variables
  • Structures and architectures for gyroscopes, accelerometers, micro strain gauges for direct application to rigid structures e.g., steel, and levitated MEMS

BPN877: Pulse Acquisition and Diagnosis for Health Monitoring

Ruiqi Guo
2022

Traditional Chinese medicine(TCM) has existed for more than two thousand years and one of the important diagnostic methods is the pulse diagnosis. It generally takes decades of training for a practitioner to master this skill as pulse acquisition and diagnosis require long-term experiences and are very subjective. The project aims to use the combination of advanced sensor technology and artificial intelligence to emulate the TCM practice for health monitoring. A flexible piezoelectric film is designed to record the wrist pulse data. A group of representative pulse features has been...

Synthesis and Gas Sensing Properties of NiO/ZnO Heterostructured Nanowires

Sikai Zhao
Yanbai Shen
Yong Xia
Aifei Pan
Zhou Li
Carlo Carraro
Roya Maboudian
2021

In this study, we report on the synthesis of the NiO/ZnO heterostructured nanowires by a facile two-step liquid phase route and their gas sensing characteristics employing Au interdigitated electrodes integrated on a miniature ceramic heater. Microstructural characterizations indicate that flocculent NiO particles are uniformly assembled on the outer surfaces of the single-crystalline ZnO nanowires, with diameters around 50 nm and lengths ranging from 500 nm to several μm. The gas sensing investigation indicates that the sensors based on NiO/ZnO heterostructured nanowires exhibit high...

In-Situ Synthesized N-Doped ZnO for Enhanced CO2 Sensing: Experiments and DFT Calculations

Yong Xia
Aifei Pan
Ya-Qiong Su
Sikai Zhao
Zhou Li
Adrian K. Davey
Libo Zhao
Carlo Carraro
Roya Maboudian
2022

Chemiresistive CO2 sensing is attractive due to low cost and ease of chip-level integration. Our previous studies (Yong Xia, 2021) showed the well-developed ZnO material fabricated by in-situ annealing exhibited good CO2 sensing performance. Here, we have expanded on those studies, including CO2 cyclic tests under both dry air and N2 background whereby a much higher response to CO2 in N2 background was observed. Detailed density functional theory calculations were conducted to understand the behavior. The results indicated nitrogen doping is mainly responsible for the observed response. In...

A New Chemresistive NO2 Sensing Material: Hafnium Diboride

Sikai Zhao
Yong Xia
Steven DelaCruz
Aifei Pan
Zhou Li
Yanbai Shen
Marcus A. Worsley
Carlo Carraro
Roya Maboudian
2022

While metal oxides and metal sulfides have been extensively studied for gas sensing applications, there are no extensive reports on gas sensing properties of metal diborides. Here, for the first time, we have investigated the conductometric gas sensing behavior of HfB2 nanoparticles. The HfB2 nanoparticles is synthesized via a sol-gel method and characterized using X-ray diffraction, field emission scanning electron microscopy, transmission electron microscopy, and X-ray photoelectron spectroscopy. The gas sensor is fabricated by drop casting the HfB2 nanoparticles on interdigitated Ag/Pd...

BPN608: FM Gyroscope

Burak Eminoglu
2022

MEMS gyroscopes for consumer devices, such as smartphones and tablets, suffer from high power consumption and drift which precludes their use in inertial navigation applications. Conventional MEMS gyroscopes detect Coriolis force through measurement of very small displacements on a sense axis, which requires low-noise, and consequently high-power, electronics. The sensitivity of the gyroscope is improved through mode-matching, but this introduces many other problems, such as low bandwidth and unreliable scale factor. Additionally, the conventional Coriolis force detection method is very...

BPN949: Optoelectronic Reservoir Computing

Philip L. Jacobson
2022

As the demand for faster, more efficient training of neural networks continues to grow, specialized photonic hardware has emerged as a potential alternative to classical computers for AI applications. Reservoir Computing (RC), a lightweight alternative to computationally-intensive Recurrent Neural Networks, has been demonstrated to be possible using simple delay dynamical systems. We propose an optoelectronic implementation of this architecture through a Mach-Zehnder modulator driven by delayed feedback from a laser. We introduce a new optoelectronic scheme in which input data is first pre...

Customizing MEMS Designs via Conditional Generative Adversarial Networks

Fanping Sui
Ruiqi Guo
Wei Yue
Kamyar Behrouzi
Liwei Lin
2021

We present a novel systematic MEMS structure design approach based on a “deep conditional generative model”. Utilizing the conditional generative adversarial network (CGAN) on a case study of circular-shaped MEMS resonators, three major advancements have been demonstrated: 1) a high-throughput vectorized MEMS design generation scheme that satisfies the geometric constraints; 2) MEMS structural customization toward tunable, desired physical properties with excellent generation accuracy; and 3) experience-free design space explorations to achieve extreme physical properties, such as...

Designing Weakly Coupled MEMS Resonators with Machine Learning-Based Method

Fanping Sui
Wei Yue
Ruiqi Guo
Kamyar Behrouzi
Liwei Lin
2021

We demonstrate a design scheme for weakly coupled resonators (WCRs) by integrating the supervised learning (SL) with the genetic algorithm (GA). In this work, three distinctive achievements have been accomplished: 1) the precise prediction of coupling characteristics of WCRs with an accuracy of 98.7% via SL; 2) the stepwise evolutionary optimization of WCR geometries while maintaining their geometric connectivity via GA; and 3) the highly efficient generation of WCR designs with a mean coupling factor down to 0.0056, which outperforms 98% of random designs. The coupling behavior analysis...

BSAC's Best: Fall 2020 Oral Presentation Winners Announced

September 24, 2020

BSAC would like to thank all of the researchers who presented their research during BSAC's Fall 2020 Research Review, September 21-23.

BSAC Industrial Members voted for their favorite oral presentations and the results are in. Please join us in congratulating the winners of the Fall 2020 Best of BSAC honors, Mallika Bariya and Daniel Teal!

...

BPN922: Analog Optical Voltage Sensor

Jordan L. Edmunds
Soner Sonmezoglu
2021

Distributed sensors are becoming ubiquitous in manufacturing, automotive, and consumer applications. One extremely common need at the core of many of these sensors is the requirement to sense small voltages (uV-mV scale), amplify, digitize, and then communicate those bits so they can be acted on. We are taking a different approach - by utilizing nonlinear optical materials, we plan to transduce these signals directly into reflected light, removing the need for complex and high-cost sensor-side circuitry. Since the mechanism is purely passive and does not require a continuous power...