Physical Sensors & Devices

Research that includes:

  • Silicon MEMS actuators: comb, electro-thermal, and plastic deformation
  • Precision electronic sensing and measurements of capacitive, frequency, and coulombic MEMS variables
  • Structures and architectures for gyroscopes, accelerometers, micro strain gauges for direct application to rigid structures e.g., steel, and levitated MEMS

BPNX1019: 3D Printing of Piezoelectric Materials and their US Transducers & Sensor Applications

Haotian Lu
Victor Couedel
2024

The performance of ultrasonic transducers is largely determined by the piezoelectric properties and geometries of their active elements. Due to the brittle nature of piezoceramics, existing processing tools for piezoelectric elements only achieve simple geometries, including flat disks, cylinders, cubes and rings. While advances in additive manufacturing give rise to free-form fabrication of piezoceramics, the resultant transducers suffer from high porosity, weak piezoelectric responses, and limited geometrical flexibility. We introduce optimized piezoceramic printing and...

Hyong Min Kim

Graduate Student Researcher
Electrical Engineering and Computer Sciences
Professor Ali Javey (Advisor)
Ph.D. 2028 (Anticipated)

Hyong is a Ph.D. student in the Electrical Engineering and Computer Sciences Department at University of California, Berkeley. He received his Bachelor's Degree in Electrical Engineering from the Univeristy of Pennsylvania in 2023. In his undergraduate research, Hyong studied quantum emission from strained 2D materials, ferroelectric field-emission transistors based on AlScN/2D material heterostructures, and scanning probe characterization of 1D-2D material interfaces. Hyong's current research at Berkeley is on fabricating next-generation Mid-Wave Infrared (MWIR) optoelectronic devices...

BPN992: Sensing and Actuation Applications Using Lithium Niobate PMUTs

Wei Yue
Megan Teng
Hanxiao Liu
Yande Peng
2025

Sensing, actuation and imaging applications based on ultrasounds could expand to many applications by means of miniaturization and low power consumption via MEMS fabrication technologies. Piezoelectric micromachined ultrasound transducers (PMUTs) with thin film designs have emerged as key commercial products but current state-of-art PMUTs are limited by the acoustic power/pressure for applications within a limited range by using AlN as the piezoelectrical material due to its process compatibility with microelectronics. One BSAC industrial member has developed a process to make PMUT devices...

Victor Couedel

Graduate Student Researcher
Mechanical Engineering
Professor Rayne Zheng (Advisor)
Ph.D. 2026 (Anticipated)

Mechanical Engineering Ph.D Student in Dr. Xiaoyu 'Rayne' Zheng's Additive Manufacturing and Metamaterials laboratory.
Interested in new additive manufacturing processes and printable materials.

Currently working on 3D printing of piezoelectric architected ceramics for underwater acoustic applications.

BSAC Fall 2024 Research Review Presenter

BPN951: Berkeley Low-cost Interplanetary Solar Sail (BLISS)

Alexander Alvara
Bhuvan M. Belur
2024

Space exploration often costs multiple millions of dollars for each exploratory mission to get a single piece of equipment into orbit. These missions usually return information in the form of scans or images or samples in the form of extracted material. This work proposes the manufacture and deployment of thousands of imaging capable solar sails systems with 10 gram payloads. Power generation is enabled through solar panels and batteries. Navigation is enabled through one square meter solar sails maneuvered by inchworm motors. Communications are enabled by laser transmitters and SPAD...

Lego-Like Reconfigurable Soft Haptic Array via Self-Healing Sensor/Actuator Modules

Peisheng He
Wenying Qiu
Yande Peng
Jong Ha Park
Qilong Cheng
David Bogy
Liwei Lin
2024

Soft haptic devices could enable unique applications in AR/VR, healthcare, and human-machine interface systems. Here, a versatile reconfigurable haptic system is proposed for different application scenarios at diverse anatomical locations and body shapes. Lego toys are the inspiration of the module concept where individual haptic modules can be cut, reconfigured, and reconnected as a new system in the ambient environment repeatedly.

Each module consists of the basic building block of flexible selfhealable ion-conducting and insulating layers....

A Non-Wolatile Surface Tension-Driven Electricochemical Liquid Metal Actuator

Xiaohang Chen
Zihan Wang
Wei Yue
Peisheng He
Liwei Lin
2024

We present a surface-tension driven electrochemical liquid metal (LM) actuator without the gas-producing sidereaction and capable of fabrication/operation in ambient air for practical applications. A hybrid supercapacitor is introduced to inhibit the common counter electrode side reactions, and the use of quasi-solid-state ionic hydrogel instead of liquid electrolyte further enables non-volatile operations. A 2×4 LM droplet array is demonstrated to actuate by a low driving voltage of 3.5 V for a maximum force of ~8.5 mN and a displacement of 0.56 mm in only 1.75 s. With the favorable...

BPN978: Hot Car Studies: Preventing Child Vehicular Heatstroke

Anthony Hon
2024

Young children trapped in a car without adult supervision may suffer life-threatening complications such as hyperthermia and heat stroke from extreme temperatures—which may rise to 130 °F in some cases. Our research aims to ascertain child presence within two to three minutes of unsupervised activity by probing increases in the levels of carbon dioxide emitted during human exhalation. Non-dispersive infrared (NDIR) sensors are employed to measure car carbon dioxide concentrations every two seconds. Specific numerical metrics are then derived from the data, and the presence of a child can...

BPN991: Autolabeling for Large-Scale Detection Datasets

Philip L. Jacobson
2024

3D perception is an essential task for autonomous driving, and thus building the most accurate, computationally efficient, fast, and label efficient models is of great interest. In particular, label-efficient 3D detection is attractive as manual labeling of 3D LiDAR point clouds is both costly and time-consuming. Autolabeling is a machine learning paradigm in which a model is trained on a (small) set of labeled data before being used to generate predictions, known as pseudo-labels, on a large set of unlabeled data which can then be used to train an accurate downstream model with only a...

BPN956: Time-of-Flight Hardware for the Solar Probe ANalyzer for Ions (SPAN-Ion)

Omar Alkendi
Lydia Lee
2023

Monitoring and building our understanding of space weather is necessary to protect current and future astronauts and hardware, as well as further our understanding of its effects on atmospheric development and loss. This project has developed two radiation-hardened sensor frontends to measure the ion composition of the solar wind aboard the Solar Probe ANalyzer for Ions (SPAN-Ion). SPAN-Ion uses time-of-flight mass spectrometry to distinguish ions by their mass: charge ratios; the target architecture for future missions decreases mass and increases speed in exchange for several orders of...