NT25: VLSI MEMS Switch

Two important advantages of MEMS switches are their ability to survive heat and radiation. In addition, there has been increasing demand for passing transistor replacement in specific reconfigurable computing and signal routing application; passing transistors used in VLSI exhibit on-state resistances of thousands of ohms or more, which causes signal delay and increased power consumption. In this project, the design, fabrication and characterization of MEMS contact switches customized for VLSI are presented, herein referred to as “VLSI MEMS switches”.

Project end date: 01/23/07