NT25: VLSI MEMS Switch


Two important advantages of MEMS switches are their ability to survive heat and radiation. In addition, there has been increasing demand for passing transistor replacement in specific reconfigurable computing and signal routing application; passing transistors used in VLSI exhibit on-state resistances of thousands of ohms or more, which causes signal delay and increased power consumption. In this project, the design, fabrication and characterization of MEMS contact switches customized for VLSI are presented, herein referred to as “VLSI MEMS switches”.

Project end date: 01/23/07

Publication date: 
August 23, 2006
Publication type: 
BSAC Project Materials (Final/Archive)
PREPUBLICATION DATA - ©University of California 2006

*Only registered BSAC Industrial Members may view project materials & publications. Click here to request member-only access.