BPN930: Robust MEMS Inchworm Motors


We are developing robust, high force, low power, and efficient MEMS inchworm motors for microrobots. So far, we have created 3x4.7mm motors in a 40um SOI process capable of linearly actuating a shuttle with 15mN force and 5mm/s at < 1mW power draw to > 50mm displacement. By integrating these motors into 550um thick reinforcing silicon substrate structures we created a microgripper capable of reliably lifting 1g weights and other macroscopic objects. We also showed gripper operation off solar power in BSAC project BPN873. Recently, we believe we have figured out how to realistically achieve a total efficiency (electrical power in to mechanical power out) well north of 50%.

Publication date: 
August 24, 2021
Publication type: 
BSAC Project Materials (Current)
PREPUBLICATION DATA - ©University of California 2021

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