NT23: Ni Electroplated Vertical Comb-Drive Actuator


A low-cost, vertical comb-drive actuator has been developed employing a thick photoresist and electroplating process. The vertical comb-drive actuator (VCA) will be employed for optical applications such as scanning mirrors and optical communication as well as other devices such as tunable capacitors

Project end date: 08/18/04

Publication date: 
February 9, 2004
Publication type: 
BSAC Project Materials (Final/Archive)
PREPUBLICATION DATA - ©University of California 2004

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