Abstract:
A low-cost, vertical comb-drive actuator has been developed employing a thick photoresist and electroplating process. The vertical comb-drive actuator (VCA) will be employed for optical applications such as scanning mirrors and optical communication as well as other devices such as tunable capacitors
Project end date: 08/18/04
Publication date:
February 9, 2004
Publication type:
BSAC Project Materials (Final/Archive)
Citation:
PREPUBLICATION DATA - ©University of California 2004