Physical Sensors & Devices

Research that includes:

  • Silicon MEMS actuators: comb, electro-thermal, and plastic deformation
  • Precision electronic sensing and measurements of capacitive, frequency, and coulombic MEMS variables
  • Structures and architectures for gyroscopes, accelerometers, micro strain gauges for direct application to rigid structures e.g., steel, and levitated MEMS

BPN784: Aluminum Gallium Nitride 2DEG Sensors and Devices

Kaiyuan Yao
2015

Two dimensional electron gas (2DEG) and hole gas (2DHG) can be induced at the interface of epitaxial AlGaN/GaN due to spontaneous and piezoelectric polarization. Such electronic system features high transport mobility, carrier density and piezoelectric sensitivity. Mechanical strain and vibrations of devices can be transduced to electronic signals in embeded 2DEG for further processing. In this project, we study physical properties of this strongly-coupled electromechanical system, and develop possible devices such as pressure sensor, MEMS resonator, ultrasonic transducer, etc....

BPN435: A Micromechanical Power Amplifier

Wei-Chang Li
2015

This overall project aims to demonstrate methods for amplifying signals with higher efficiency compared to transistor circuitry using strictly mechanical means for ultra-low-power signal processing applications.

Project end date: 08/26/15

BPN697: Natural Gas Pipeline Research

Pit Pillatsch
2015

The project goal is to develop technologies for natural gas pipelines that provide increased system awareness and reliability, lower system costs, better assessment of pipeline integrity, and provide tangible benefits for utility customers. The benefits sought are natural gas pipelines that are more reliable, efficient, and secure. The BSAC research is divided into three areas: 1. Microfabricated MEMS natural gas sensors 2. Low-power wireless sensor communication infrastructure 3. Ultrasonic diagnostic and test devices for natural gas pipelines

Project end date: ...

BPN783: Low-Power Conductometric Soot Sensor with Fast Self-Regeneration

Ameya Rao
2015

We are designing a conductometric soot sensor that measures the change in conductance resulting from soot deposition onto the sensor. Although previous work has been done on conductometric soot sensing, current sensors are power intensive (5-30 W) and slow (60-170 s between sensing cycles) due to their large size, ineffective thermal insulation, and the high currents required for soot combustion (when self-regenerating). We propose to use MEMS fabrication methods to develop a miniaturized conductometric soot sensor with a built-in polysilicon microheater for self-regeneration, whose...

BPN684: Integrated Microgyroscopes with Improved Scale-Factor and Bias Stability

Jason Su
2015

Despite their small size, low power dissipation, and low cost, the large bias and scale factor errors of current MEMS inertial sensors preclude using them for dead reckoning navigation. Although these shortcomings can be overcome with precision manufacturing and extensive calibration, such solutions suffer from high cost and secondary effects such as long term drift. Presently, the use of in-situ calibration techniques in MEMS sensors is limited to the electronic interfaces, where they are instrumental for reducing drift arising from electronic components. This project extends the...

BPN746: Liquid Heterojunction Sensors

Hiroki Ota
Kevin Chen
2015

In recent years, mechanically deformable devices and sensors have been widely explored for various applications such as paper-thin displays and electronic skin for prosthetics and robotics. Liquids are extremely deformable and have shown promise for these applications, with previous works demonstrating pressure sensors with the ability to be stretched by up to 250% before failure.However, current technology is limited to a single liquid material as liquids tend to intermix when placed together, limiting the range of sensors that can be achieved. Here, in this work, we show a new...

BPN781: 3-Axis MEMS Gyroscope

Soner Sonmezoglu
Parsa Taheri-Tehrani
2016

The goal of the project is to design the resonator and electronics for a single structure 3-Axis MEMS vibratory rate gyroscope. The mechanical structure of the device will be designed to have the capability of 3-Axis sensing performance. Low-power CMOS electronics will be designed to meet the requirements for consumer electronics.

Project end date: 01/31/16

BPN738: Sensor Instrumentation to Improve Safety of U.S. Underground Coal Mines

Omid Mahdavipour
2016

Coal mining is recognized as a dangerous undertaking. Explosions of coal dust and gases that may exist underground (such as methane) are well-known hazards, in addition to which are unexpected structural collapses. In order to prevent the propagation of coal dust explosions, regulations require that inert rock dust is applied in underground areas of a coal mine. This project is aimed at creating real-time sensors to determine the explosibility of a coal and rock dust mixture and to communicate the results from inside the mine to safety personnel above ground.

Project...

BPN810: Non-Intrusive Wireless Current Metering of Standard Power Cables Using Vector Magnetic Field Measurements

Naing Ye Aung
Michael C. Lorek
2016

The goal of this project is to design a non-intrusive meter that can accurately measure the current in a standard electric power cable such as an extension cord or lamp cord by monitoring the vector magnetic field around it. Standard ’non-intrusive’ current meters either require the conductors to be separated and a single conductor inserted through a magnetic loop-based current transformer, or use an external magnetic field sensor and knowledge of the relative geometry of the wires and sensor. The net flux surrounding a standard power cable is zero because there is no net current in...

BPN722: 3D Ultrasonic Fingerprint Sensor On a Chip Using Piezoelectric Micromachined Ultrasonic Transducers (PMUT)

Joshua Kay
Joy Jiang
2016

We've successfully built a 500dpi, 4.75mm x 3.5mm monolithic ultrasonic fingerprint sensor on a chip with PMUT and integrated CMOS process that solves the problem of capacitive fingerprint sensors. The sensor is resilient to common contamination such as dirt, sweat, and oil by penetrating through them, and the sensor has the capability of capturing inner-finger feature such as dermis fingerprint. The capability of generating a three- dimensional, volumetric image of the finger surface and the tissues beneath the finger surface makes it extremely difficult to deceive the sensor with...