BPN628: Novel Ultrasonic Fingerprint Sensor Based on High-Frequency Piezoelectric Micromachined Ultrasonic Transducers (PMUTs)


This project presents the first MEMS ultrasonic fingerprint sensor with the capability to image epidermis and dermis layer fingerprints. The sensor is based on a piezoelectric micromachined ultrasonic transducer (PMUT) array that is bonded at wafer- level to complementary metal oxide semiconductor (CMOS) signal processing electronics to produce a pulse-echo ultrasonic imager on a chip. To meet the 500 DPI standard for consumer fingerprint sensors, the PMUT pitch was reduced by approximately a factor of two relative to an earlier design. We conducted a systematic design study of the individual PMUT and array to achieve this scaling while maintaining a high fill-factor.

Project end date: 08/06/18

Xiaoyue (Joy) Jiang
Publication date: 
January 26, 2018
Publication type: 
BSAC Project Materials (Final/Archive)
PREPUBLICATION DATA - ©University of California 2018

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