Abstract:
The goal of this project is to design, fabricate and characterize novel MEMS devices based on scandium aluminum nitride (ScAlN) thin films. ScAlN thin film is a promising piezoelectric material due to its CMOS process compatibility, low relative permittivity and high piezoelectric coefficient and enables better performance of piezoelectric MEMS devices.
Project end date: 08/07/18
Publication date:
January 26, 2018
Publication type:
BSAC Project Materials (Final/Archive)
Citation:
PREPUBLICATION DATA - ©University of California 2018