Liwei Lin (Advisor)

Research Advised by Professor Liwei Lin

Lin Group:  List of Projects | List of Researchers

BPN353: Integration of MEMS switches and RF passive components

Tommy Fujii
Dan McCormick
2006

In order to develop advanced multi-functional RF devices for future applications, it is expected that significant advancements must be made to existing technologies or a new technology must be developed. One such enabling technology is the ability to integrate all passive elements and switches monolithically. This technology would represent a new class of RF design and manufacturing capabilities. In order to develop this technology and make it a reality, we are investigating the feasibility of a fabrication process integrating high quality MEMS switches, spiral inductors and MIS...

LWL24: Rapid Bonding of MEMS Strain Gauge to Steel

Brian D. Sosnowchik
Ko-Min Liao
2007

A rapid and reliable bonding method is needed to bond MEMS strain gauges to steel. The MEMS strain gauge is to be bonded to the manufactured steel after all other steel treatment steps have been completed; hence the bonding method must be kept at low temperature to prevent any thermal damage to the steel composition. In addition, the bonding method must not introduce high residual strains, which would cause error in strain gauge measurements. The strain gauge to steel bond must also have the ability to survive several years in a wide working temperature range (-60oC to 150oC) in an...

MCW8: MEMS Endoscopic Lens-Based Optical Coherence Tomography

Ki-Hun Jeong
Jingyi Chen
Jongbaeg Kim
2006

There is a need to develop a compact in dimension, high speed, bi-axial scanning, and robust scanner with Microelectromechanical Systems (MEMS) technology for in vivo imaging in Optical Coherence Tomography (OCT) applications. These MEMS based endoscoopes with distal beam scanning can image with higher speed, precision, and repeatability than conventional linear scanning endoscopes in which the entire endoscope is mechanically translated with respect to the observed tissue. Most importantly, with bi-axial scanning capability of the MEMS scanner, three dimensional in vivo real time...

LWL26: Nano Photodetectors

Lei Luo
2007

Development of UV sensors using nanowires of wide-gap materials for applications in nano-optics and chemical-detection.

Project end date: 01/29/08

BPN307: CMOS Integrated Nanowires/Nanotubes (CMOS-Inn)

Yingqi Jiang
2008

The goal of this project is to develop technologies for hierarchical assembly of nano structures (silicon nanowires (SNWs) and carbon nanotubes (CNTs)) with built-in CMOS interface circuits by utilizing localized and selective IC-compatible synthesis, for a fully integrated nano-sensing system. Ultimately, both the nano-sensor element and the signal processing circuits should be fabricated on the same device substrate. The SNWs/CNTs will be synthesized afterwards locally and selectively using MEMS resistive heaters. In order to develop the integration process, we plan to use the 0.35...

BPN426: Flat Micro Heat Pipes for Cooling Applications

Armon Mahajerin
2008

The purpose of this project is to develop novel, flat (less than 1 mm thick) micro-machined heat pipe devices that may be implemented directly onto chips for cooling purposes. Using silicon to pattern and etch the microchannels for the heat pipe mechanism facilitates the integration of this technology by eliminating thermal mismatch between the chip and cooling device. The primary goal of using a heat pipe-based design versus the conventional heat sinks (usually fins) is to greatly improve the effective thermal conductivity of the cooling apparatus. This project currently is in the...

BPN308: Plastically Self-Aligned Micromirrors

SangHoon Lee
Chieh Chang
2008

This project aims to use the plastic deformation of single-crystal-silicon as the key process to make Angular Vertical Comb-drive (AVC) torsional microactuators using a simple three-mask process on silicon-on-insulator wafer and yet providing versatility for the potential applications in Optical MEMS (switches, bi-directional free-space laser communications), RF MEMS (variable capacitor), Image/display (head mount display) and the others.

Project end date: 07/30/08

BPN352: Micro/Nano Fluidic Interconnector

SangHoon Lee
2008

In this project, near-field electrospinning (NFES) is applied for site-specific, chip-to-chip micro/nano fluidic interconnectors. This fabrication/packaging technology enables off-chip fluidic transportations through fluidic channels of 50nm~5μm in diameter. Near-field electrospinning has the position controllability better than 10μm in contrast to the random deposition of conventional electrospinning.

Project end date: 09/03/08

BPN330: Non-magnetic Micro Heater

Jui-Ming (Ryan) Yang
2009

Non-magnetic heaters are desirable for systems sensitive magnetic fields, such as micromachined gyroscopes using spin-polarized nuclei. The short-term objective of this project is to design and fabricate MEMS resistive heaters that will generate minimum magnetic field while under resistive heating to provide the heating source for the micromachined gyroscope using spin-polarized nuclei. The long-term goal of the project is the integration of the non-magnetic heater with other components to accomplish micromachined gyroscope using spin-polarized nuclei within the magnetic shielding...

BPN329: Micro Magnetic Shielded Packaging

Armon Mahajerin
Woon-Kyung (Kevin) Choi
2008

The long-term goal of the project is to create the magnetic shielding packaging for a micro-machined gyroscope using spin-polarized nuclei. The shield is to have an attenuation above 10 to the 6 and a small size of approximately one cubic centimeter volume while allowing signal transmission lines to communicate with outside world. This is accomplished with multiple layers of high permeability material such as nickel-iron alloy. Current work focuses on new methods of fabricating shielding devices and the exploration of additional shielding materials.

Project end date:...