Abstract:
This project aims to use the plastic deformation of single-crystal-silicon as the key process to make Angular Vertical Comb-drive (AVC) torsional microactuators using a simple three-mask process on silicon-on-insulator wafer and yet providing versatility for the potential applications in Optical MEMS (switches, bi-directional free-space laser communications), RF MEMS (variable capacitor), Image/display (head mount display) and the others.
Project end date: 07/30/08
Publication date:
April 9, 2008
Publication type:
BSAC Project Materials (Final/Archive)
Citation:
PREPUBLICATION DATA - ©University of California 2008