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Search publications by topic, publication type, advisor, author, or keywords by selecting the criteria below.
| Title | Author | Year | Publication type |
|---|---|---|---|
| Electrostatic Comb Drive for Resonant Sensor and Actuator Applications | William C.-K. Tang; Roger T. Howe | 1990 | Master's Thesis |
| Polysilicon Microstructures to Characterize State Friction | Martin Lim; Roger T. Howe; Roberto Horowitz | 1990 | Master's Thesis |
| Integrated Micromachinery -- Moving Structures on Silicon Chips | Long-Sheng Fan; Richard S. Muller | 1990 | Ph.D. Dissertation |
| Formation, Properties, and Applications of Porous Silicon | Rolfe Anderson; Richard S. Muller | 1990 | Ph.D. Dissertation |
| IC-Processed Polysilicon Micromechanics: Technology, Material, and Devices | Yu-Chong Tai; Richard S. Muller; Roger T. Howe | 1989 | Ph.D. Dissertation |
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